{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,29]],"date-time":"2024-10-29T12:13:19Z","timestamp":1730203999658,"version":"3.28.0"},"reference-count":9,"publisher":"IEEE","license":[{"start":{"date-parts":[[2013,5,1]],"date-time":"2013-05-01T00:00:00Z","timestamp":1367366400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2013,5,1]],"date-time":"2013-05-01T00:00:00Z","timestamp":1367366400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,5]]},"DOI":"10.1109\/ccece.2013.6567805","type":"proceedings-article","created":{"date-parts":[[2013,8,1]],"date-time":"2013-08-01T20:13:48Z","timestamp":1375388028000},"page":"1-4","source":"Crossref","is-referenced-by-count":2,"title":["Cross-axis sensitivity enhancement for a quad beam piezoresistive accelerometer"],"prefix":"10.1109","author":[{"given":"Yi","family":"Luo","sequence":"first","affiliation":[{"name":"Electrical and Computer Engineering, Faculty of Applied Science, University of British Columbia, 2332 Main Mall, Vancouver, BC, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/ICSENS.2009.5398271"},{"key":"2","doi-asserted-by":"crossref","first-page":"25008","DOI":"10.1088\/0960-1317\/19\/2\/025008","article-title":"Performance enhancement of a silicon MEMS piezoresistive single axis accelerosmeter with electroplated gold on a proof mass","volume":"19","author":"sankar","year":"2009","journal-title":"Journal of Micromechanics and Microengineering"},{"key":"1","doi-asserted-by":"crossref","first-page":"118","DOI":"10.1049\/mnl.2011.0717","article-title":"Realization of silicon piezoresistive accelerometer with proof mass-edge-aligned-flexures Using Wet aanisotropic etching","volume":"7","author":"sankar","year":"2011","journal-title":"Micro & Nano Letters"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/17\/4\/009"},{"key":"6","first-page":"76","article-title":"Desigia mad eabdcation of mgh sensitive piezoreaiehve MEM5 acceleronaeter","volume":"91","author":"joahi","year":"2008","journal-title":"Sensors and Transducers"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(98)80007-1"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(97)80424-4"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.3390\/s110807892"},{"key":"8","doi-asserted-by":"crossref","first-page":"1835","DOI":"10.1007\/s00542-009-0920-4","article-title":"Miniacrurization limits of piezoresistive MEMS accelerometers","volume":"15","author":"enggesser","year":"2009","journal-title":"Microsyst Technol"}],"event":{"name":"2013 26th IEEE Canadian Conference on Electrical and Computer Engineering (CCECE)","start":{"date-parts":[[2013,5,5]]},"location":"Regina, SK, Canada","end":{"date-parts":[[2013,5,8]]}},"container-title":["2013 26th IEEE Canadian Conference on Electrical and Computer Engineering (CCECE)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6547899\/6567660\/06567805.pdf?arnumber=6567805","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,4,14]],"date-time":"2023-04-14T17:25:21Z","timestamp":1681493121000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/6567805\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,5]]},"references-count":9,"URL":"https:\/\/doi.org\/10.1109\/ccece.2013.6567805","relation":{},"subject":[],"published":{"date-parts":[[2013,5]]}}}