{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,29]],"date-time":"2024-10-29T12:20:53Z","timestamp":1730204453083,"version":"3.28.0"},"reference-count":12,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2017,8]]},"DOI":"10.1109\/ccta.2017.8062548","type":"proceedings-article","created":{"date-parts":[[2017,10,24]],"date-time":"2017-10-24T16:33:56Z","timestamp":1508862836000},"page":"726-731","source":"Crossref","is-referenced-by-count":0,"title":["Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements"],"prefix":"10.1109","author":[{"given":"Gert","family":"Witvoet","sequence":"first","affiliation":[]},{"given":"Stefan","family":"Kulper","sequence":"additional","affiliation":[]},{"given":"Geerten","family":"Kramer","sequence":"additional","affiliation":[]},{"given":"Max","family":"Baeten","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1117\/12.2011463"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1016\/j.cirp.2006.10.010"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.3390\/s140100877"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.45.5423"},{"journal-title":"Multivariable Feedback Design","year":"1989","author":"maciejowski","key":"ref11"},{"key":"ref5","first-page":"90501","article-title":"Parallel, miniaturized scanning probe microscope for defect inspection and review","volume":"9050","author":"sadeghian","year":"2014","journal-title":"Proc SPIE"},{"journal-title":"Multivariable Feedback Control Analysis and Design","year":"2005","author":"skogestad","key":"ref12"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/j.ijmachtools.2009.10.012"},{"key":"ref7","first-page":"1","author":"jager","year":"2009","journal-title":"Nanomeasuring and Nanopositioning Engineering"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1117\/12.2011046"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1088\/0957-0233\/22\/9\/094010"},{"key":"ref1","first-page":"97781","article-title":"Large dynamic range atomic force microscope for overlay improvements","volume":"9778","author":"kuiper","year":"2016","journal-title":"Proc SPLE"}],"event":{"name":"2017 IEEE Conference on Control Technology and Applications (CCTA)","start":{"date-parts":[[2017,8,27]]},"location":"Mauna Lani Resort, HI, USA","end":{"date-parts":[[2017,8,30]]}},"container-title":["2017 IEEE Conference on Control Technology and Applications (CCTA)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8052581\/8062426\/08062548.pdf?arnumber=8062548","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,10,27]],"date-time":"2017-10-27T23:35:21Z","timestamp":1509147321000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/8062548\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,8]]},"references-count":12,"URL":"https:\/\/doi.org\/10.1109\/ccta.2017.8062548","relation":{},"subject":[],"published":{"date-parts":[[2017,8]]}}}