{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T07:44:02Z","timestamp":1729669442843,"version":"3.28.0"},"reference-count":7,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2004]]},"DOI":"10.1109\/cdc.2004.1429416","type":"proceedings-article","created":{"date-parts":[[2008,8,27]],"date-time":"2008-08-27T14:10:36Z","timestamp":1219846236000},"page":"4231-4236 Vol.4","source":"Crossref","is-referenced-by-count":1,"title":["An adaptive model for the control of critical dimension in photolithography process"],"prefix":"10.1109","author":[{"family":"Wei Kang","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Ziqiang John Mao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"crossref","first-page":"503","DOI":"10.1109\/66.806128","article-title":"Intelligent control of via formation by photosensitive BCB for MCM-L\/D applications","volume":"12","author":"kim","year":"1999","journal-title":"IEEE Transactions on Semiconductor Manufacturing"},{"key":"2","article-title":"Adaptive modeling and H?, control for photolithography manufacturing process","author":"kang","year":"2004","journal-title":"Proc American Control Conference"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/66.670178"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/9.489271"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2002.801392"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/66.492814"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/66.492813"}],"event":{"name":"2004 43rd IEEE Conference on Decision and Control (CDC) (IEEE Cat. No.04CH37601)","start":{"date-parts":[[2004,12,17]]},"location":"Nassau, Bahamas","end":{"date-parts":[[2004,12,17]]}},"container-title":["2004 43rd IEEE Conference on Decision and Control (CDC) (IEEE Cat. No.04CH37601)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/9774\/30838\/01429416.pdf?arnumber=1429416","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,18]],"date-time":"2017-06-18T07:16:05Z","timestamp":1497770165000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1429416\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2004]]},"references-count":7,"URL":"https:\/\/doi.org\/10.1109\/cdc.2004.1429416","relation":{},"subject":[],"published":{"date-parts":[[2004]]}}}