{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,5]],"date-time":"2026-07-05T01:56:11Z","timestamp":1783216571317,"version":"3.54.6"},"reference-count":12,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2014,12]]},"DOI":"10.1109\/cdc.2014.7040457","type":"proceedings-article","created":{"date-parts":[[2015,2,17]],"date-time":"2015-02-17T19:53:59Z","timestamp":1424202839000},"page":"6801-6806","source":"Crossref","is-referenced-by-count":5,"title":["A dual probes AFM system with effective tilting angles to achieve high-precision scanning"],"prefix":"10.1109","author":[{"given":"Yi-Ting","family":"Lin","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yu-Ting","family":"Lo","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jim-Wei","family":"Wu","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wei-Chih","family":"Liu","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Li-Chen","family":"Fu","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechatronics.2004.04.005"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.56.930"},{"key":"ref10","article-title":"New three-dimensional AFM for CD measurement and sidewall characterization","author":"hua","year":"2011","journal-title":"SPIE Advanced Lithography International Society for Optics and Photonics"},{"key":"ref6","doi-asserted-by":"crossref","first-page":"13706","DOI":"10.1063\/1.3676651","article-title":"Rapid measurement of a high step microstructure with 90° steep sidewall","volume":"83","author":"bing-feng","year":"2012","journal-title":"Review of Scientific Instruments"},{"key":"ref11","article-title":"High Accuracy Atomic Force Microscope for Dimensional Metrology","author":"ljubicic","year":"2008"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1049\/el.2012.1020"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/ACC.2012.6315621"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1063\/1.4794368"},{"key":"ref7","first-page":"31","author":"bharat","year":"2008","journal-title":"Applied Scanning Probe Methods V"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.49.57"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1063\/1.3553199"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1088\/0022-3727\/41\/10\/103001"}],"event":{"name":"2014 IEEE 53rd Annual Conference on Decision and Control (CDC)","location":"Los Angeles, CA, USA","start":{"date-parts":[[2014,12,15]]},"end":{"date-parts":[[2014,12,17]]}},"container-title":["53rd IEEE Conference on Decision and Control"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7027307\/7039338\/07040457.pdf?arnumber=7040457","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,23]],"date-time":"2017-06-23T05:44:43Z","timestamp":1498196683000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7040457\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,12]]},"references-count":12,"URL":"https:\/\/doi.org\/10.1109\/cdc.2014.7040457","relation":{},"subject":[],"published":{"date-parts":[[2014,12]]}}}