{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,4]],"date-time":"2026-10-04T17:04:09Z","timestamp":1791133449924,"version":"4.1.0"},"reference-count":11,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2007]]},"DOI":"10.1109\/cicc.2007.4405764","type":"proceedings-article","created":{"date-parts":[[2008,7,18]],"date-time":"2008-07-18T13:19:35Z","timestamp":1216387175000},"page":"413-416","source":"Crossref","is-referenced-by-count":21,"title":["Evolution of CMOS Technology at 32 nm and Beyond"],"prefix":"10.1109","author":[{"given":"Ghavam G.","family":"Shahidi","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.1997.650496"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.1974.1050511"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.2006.346881"},{"key":"1","first-page":"11","article-title":"progress in digital integrated electronics","author":"moore","year":"1975","journal-title":"1975 International Electron Devices Meeting"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.2004.1419385"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.2001.979479"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.1998.746384"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.1997.650453"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1147\/rd.504.0419"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1109\/.2005.1469238"},{"key":"11","article-title":"high-performance high-k\/metal gates for 45nm cmos and beyond with gate-first processing","author":"chudzik","year":"2007","journal-title":"VLSI Tech Dig"}],"event":{"name":"2007 IEEE Custom Integrated Circuits Conference","location":"San Jose, CA, USA","start":{"date-parts":[[2007,9,16]]},"end":{"date-parts":[[2007,9,19]]}},"container-title":["2007 IEEE Custom Integrated Circuits Conference"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4405666\/4405667\/04405764.pdf?arnumber=4405764","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,16]],"date-time":"2017-03-16T17:25:35Z","timestamp":1489685135000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/4405764\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2007]]},"references-count":11,"URL":"https:\/\/doi.org\/10.1109\/cicc.2007.4405764","relation":{},"subject":[],"published":{"date-parts":[[2007]]}}}