{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,25]],"date-time":"2026-07-25T16:01:21Z","timestamp":1784995281137,"version":"3.55.0"},"reference-count":8,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2014,9]]},"DOI":"10.1109\/cicc.2014.6945996","type":"proceedings-article","created":{"date-parts":[[2014,11,12]],"date-time":"2014-11-12T17:50:10Z","timestamp":1415814610000},"page":"1-4","source":"Crossref","is-referenced-by-count":9,"title":["A test circuit based on a ring oscillator array for statistical characterization of Plasma-Induced Damage"],"prefix":"10.1109","author":[{"given":"Won Ho","family":"Choi","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Saroj","family":"Satapathy","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"John","family":"Keane","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chris H.","family":"Kim","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref4","first-page":"194","article-title":"Process damages in Hf02\/TiN stacks: the key role of HO and H2 anneals","volume":"4","author":"garros","year":"2005","journal-title":"Proc IEEE Int Electron Devices Meeting (IEDM)"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/RELPHY.2007.369916"},{"key":"ref6","first-page":"4a.3.1","article-title":"An array-based circuit for characterizing latent Plasma-Induced Damage","author":"choi","year":"2013","journal-title":"Proc IEEE Int Reliability Physics Symp (IRPS)"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/IRPS.2013.6532015"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.2010.5703293"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/VLSIC.2007.4342682"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/RELPHY.2006.251246"},{"key":"ref1","first-page":"377","article-title":"Detection of thin oxide (3.5nm) dielectric degradation due to charging damage by rapid-ramp breakdown","author":"hook","year":"2000","journal-title":"Proc IEEE Int Reliability Physics Symp (IRPS)"}],"event":{"name":"2014 IEEE Custom Integrated Circuits Conference - CICC 2014","location":"San Jose, CA, USA","start":{"date-parts":[[2014,9,15]]},"end":{"date-parts":[[2014,9,17]]}},"container-title":["Proceedings of the IEEE 2014 Custom Integrated Circuits Conference"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6924030\/6945974\/06945996.pdf?arnumber=6945996","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,23]],"date-time":"2017-03-23T22:22:44Z","timestamp":1490307764000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6945996\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,9]]},"references-count":8,"URL":"https:\/\/doi.org\/10.1109\/cicc.2014.6945996","relation":{},"subject":[],"published":{"date-parts":[[2014,9]]}}}