{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,29]],"date-time":"2024-10-29T13:41:06Z","timestamp":1730209266656,"version":"3.28.0"},"reference-count":26,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,8]]},"DOI":"10.1109\/coase.2012.6386329","type":"proceedings-article","created":{"date-parts":[[2013,1,2]],"date-time":"2013-01-02T23:15:40Z","timestamp":1357168540000},"page":"206-211","source":"Crossref","is-referenced-by-count":0,"title":["Petri net-based scheduling analysis of dual-arm cluster tools with wafer revisiting"],"prefix":"10.1109","author":[{"given":"Yan","family":"Qiao","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"NaiQi","family":"Wu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"MengChu","family":"Zhou","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"19","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2004.831524"},{"key":"17","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2003.810936"},{"key":"18","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2006.873402"},{"key":"15","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2003.815203"},{"key":"16","article-title":"Workload balancing and scheduling of a single-amred cluster tool","author":"lee","year":"2004","journal-title":"Proceedings of the 5th APIEMS Conference"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2008.2008633"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1016\/S0166-3615(01)00078-1"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/70.964658"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2010.2046891"},{"key":"21","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2010.2046736"},{"key":"20","doi-asserted-by":"publisher","DOI":"10.1002\/asjc.183"},{"key":"22","doi-asserted-by":"publisher","DOI":"10.1109\/ICRA.2011.5980119"},{"key":"23","doi-asserted-by":"publisher","DOI":"10.1109\/CASE.2011.6042403"},{"journal-title":"Modeling Simulation and Control of Flexible Manufacturing Systems Petri Net Approach","year":"1998","author":"zhou","key":"24"},{"key":"25","doi-asserted-by":"publisher","DOI":"10.1109\/5.24143"},{"journal-title":"System Modeling and Control with Resource-Oriented Petri Nets","year":"2009","author":"wu","key":"26"},{"key":"3","first-page":"82","article-title":"Cluster tools: A process solution","volume":"13","author":"newboe","year":"1990","journal-title":"Semiconductor International"},{"key":"2","first-page":"45","article-title":"Coping with the high cost of wafer fabs","volume":"38","author":"burggraaf","year":"1995","journal-title":"Semiconductor International"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2007.906678"},{"key":"1","first-page":"149","article-title":"Integrated processing equipment","volume":"33","author":"bader","year":"1900","journal-title":"Solid State Technology"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2006.879414"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/66.641483"},{"key":"5","first-page":"113","article-title":"The driving forces in cluster tool development","volume":"18","author":"singer","year":"1995","journal-title":"Semiconductor International"},{"key":"4","first-page":"58","article-title":"Cluster tools, Part 1: Emerging processes","volume":"13","author":"mcnab","year":"1990","journal-title":"Semiconductor International"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1109\/66.311340"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1109\/66.536110"}],"event":{"name":"2012 IEEE International Conference on Automation Science and Engineering (CASE 2012)","start":{"date-parts":[[2012,8,20]]},"location":"Seoul, Korea (South)","end":{"date-parts":[[2012,8,24]]}},"container-title":["2012 IEEE International Conference on Automation Science and Engineering (CASE)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6375512\/6386304\/06386329.pdf?arnumber=6386329","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,22]],"date-time":"2017-03-22T21:50:52Z","timestamp":1490219452000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6386329\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,8]]},"references-count":26,"URL":"https:\/\/doi.org\/10.1109\/coase.2012.6386329","relation":{},"subject":[],"published":{"date-parts":[[2012,8]]}}}