{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,7]],"date-time":"2025-11-07T13:19:16Z","timestamp":1762521556113,"version":"3.28.0"},"reference-count":14,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,8]]},"DOI":"10.1109\/coase.2012.6386484","type":"proceedings-article","created":{"date-parts":[[2013,1,2]],"date-time":"2013-01-02T23:15:40Z","timestamp":1357168540000},"page":"91-96","source":"Crossref","is-referenced-by-count":15,"title":["Multistep virtual metrology approaches for semiconductor manufacturing processes"],"prefix":"10.1109","author":[{"given":"Simone","family":"Pampuri","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Andrea","family":"Schirru","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Gian Antonio","family":"Susto","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Cristina","family":"De Luca","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Alessandro","family":"Beghi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Giuseppe","family":"De Nicolao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"13","first-page":"11614","article-title":"Multilevel kernel methods for virtual metrology in semiconductor manufacturing","volume":"18","author":"schirru","year":"2011","journal-title":"world congress"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1038\/35023233"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/MCS.1984.1104824"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2012.6212884"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/CASE.2011.6042425"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/CASE.2011.6042404"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/ISSM.2005.1513322"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.2307\/1271436"},{"key":"7","doi-asserted-by":"crossref","first-page":"267","DOI":"10.1111\/j.2517-6161.1996.tb02080.x","article-title":"Regression shrinkage and selection via the lasso","author":"tibshirani","year":"1996","journal-title":"Journal of the Royal Statistical Society Series B (Methodological)"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1023\/A:1009778005914"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/ETFA.2011.6059209"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2009.5155972"},{"key":"9","doi-asserted-by":"crossref","first-page":"83","DOI":"10.1007\/BF02985802","article-title":"The elements of statistical learning: Data mining, inference and prediction","volume":"27","author":"hastie","year":"2005","journal-title":"The Mathematical Intelligencer"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1023\/A:1018628609742"}],"event":{"name":"2012 IEEE International Conference on Automation Science and Engineering (CASE 2012)","start":{"date-parts":[[2012,8,20]]},"location":"Seoul, Korea (South)","end":{"date-parts":[[2012,8,24]]}},"container-title":["2012 IEEE International Conference on Automation Science and Engineering (CASE)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6375512\/6386304\/06386484.pdf?arnumber=6386484","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2019,7,7]],"date-time":"2019-07-07T17:12:00Z","timestamp":1562519520000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6386484\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,8]]},"references-count":14,"URL":"https:\/\/doi.org\/10.1109\/coase.2012.6386484","relation":{},"subject":[],"published":{"date-parts":[[2012,8]]}}}