{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T22:38:29Z","timestamp":1729636709650,"version":"3.28.0"},"reference-count":16,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,8]]},"DOI":"10.1109\/coase.2013.6653995","type":"proceedings-article","created":{"date-parts":[[2013,11,11]],"date-time":"2013-11-11T17:22:15Z","timestamp":1384190535000},"page":"342-349","source":"Crossref","is-referenced-by-count":3,"title":["An efficient proximity probing algorithm for metrology"],"prefix":"10.1109","author":[{"given":"Fatemeh","family":"Panahi","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Aviv","family":"Adler","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"A. Frank","family":"van der Stappen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ken","family":"Goldberg","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"15","article-title":"Electrical measurements on nanoscale materials","author":"niemann","year":"2004","journal-title":"Keithley Instruments Tutorial Paper"},{"key":"16","article-title":"Efficient distance probing algorithms for metrology","author":"panahi","year":"2013","journal-title":"Dept of Information and Computing Sciences"},{"key":"13","doi-asserted-by":"crossref","first-page":"235","DOI":"10.1016\/0020-0190(88)90196-2","article-title":"Reconstruction of polygons from projections","volume":"28","author":"li","year":"1988","journal-title":"Information Processing Letters"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1016\/0196-6774(91)90009-N"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1177\/027836499401300102"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1007\/BF00151583"},{"journal-title":"Fundamentals of Dimensional Metrology","year":"2006","author":"dotson","key":"3"},{"journal-title":"Scanning Probe Microscopy of Functional Materials","year":"2011","author":"sergei","key":"2"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1007\/BF01553911"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1007\/BF01758849"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1016\/0196-6774(87)90025-3"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/CoASE.2012.6386484"},{"key":"5","first-page":"358","article-title":"An information-theory and virtual metrologybased approach to run-to-run semiconductor manufacturing control","author":"susto","year":"2012","journal-title":"Proceedings of the 8th IEEE International Conference on Automation Science and Engineering"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-642-16641-9"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1145\/12130.12174"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1109\/5.163406"}],"event":{"name":"2013 IEEE International Conference on Automation Science and Engineering (CASE 2013)","start":{"date-parts":[[2013,8,17]]},"location":"Madison, WI, USA","end":{"date-parts":[[2013,8,20]]}},"container-title":["2013 IEEE International Conference on Automation Science and Engineering (CASE)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6639384\/6653883\/06653995.pdf?arnumber=6653995","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,21]],"date-time":"2017-06-21T21:46:03Z","timestamp":1498081563000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6653995\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,8]]},"references-count":16,"URL":"https:\/\/doi.org\/10.1109\/coase.2013.6653995","relation":{},"subject":[],"published":{"date-parts":[[2013,8]]}}}