{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,2]],"date-time":"2026-03-02T10:56:22Z","timestamp":1772448982117,"version":"3.50.1"},"reference-count":19,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2014,8]]},"DOI":"10.1109\/coase.2014.6899307","type":"proceedings-article","created":{"date-parts":[[2014,11,11]],"date-time":"2014-11-11T19:28:58Z","timestamp":1415734138000},"page":"75-80","source":"Crossref","is-referenced-by-count":3,"title":["Optimal scheduling of single-arm multi-cluster tools with two-space buffering modules"],"prefix":"10.1109","author":[{"given":"FaJun","family":"Yang","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"NaiQi","family":"Wu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yan","family":"Qiao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"MengChu","family":"Zhou","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/66.311340"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/66.641483"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/5326.760564"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2008.2000425"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2010.2046736"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/70.964666"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2011.2178023"},{"key":"ref17","doi-asserted-by":"crossref","first-page":"321","DOI":"10.1109\/TASE.2007.906678","article-title":"Steady-State Throughput and Scheduling Analysis of Multi-Cluster Tools for Semiconductor Manufacturing: A Decomposition Approach","volume":"5","author":"yi","year":"2008","journal-title":"IEEE Transactions on Automation Science and Engineering"},{"key":"ref18","author":"zhou","year":"1998","journal-title":"Modeling Simulation and Control of Flexible Manufacturing Systems A Petri Net Approach"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/70.964658"},{"key":"ref4","doi-asserted-by":"crossref","first-page":"17","DOI":"10.1109\/TASE.2010.2046893","article-title":"Optimal Scheduling of Multi-cluster Tools with Constant Robot Moving Times, Part II: Tree-Like Topology Configurations","volume":"8","author":"chan","year":"2011","journal-title":"IEEE Transactions on Automation Science and Engineering"},{"key":"ref3","doi-asserted-by":"crossref","first-page":"5","DOI":"10.1109\/TASE.2010.2046891","article-title":"Optimal Scheduling of Multi-cluster Tools with Constant Robot Moving Times, Part I: Two-Cluster Analysis","volume":"8","author":"chan","year":"2011","journal-title":"IEEE Transactions on Automation Science and Engineering"},{"key":"ref6","first-page":"638","article-title":"Method and Apparatus for Scheduling Wafer Processing within a Multiple Chamber Semiconductor Wafer Processing Tool Having a Multiple Blade Robot","volume":"6","author":"jevtic","year":"2001"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2006.879414"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2003.810936"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2003.815203"},{"key":"ref2","first-page":"335","article-title":"Optimal scheduling of k-unit production of cluster tools with single-blade robots","author":"chan","year":"2008","journal-title":"Proc IEEE Int Conf Auto Sci Eng"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/COASE.2007.4341844"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/66.536110"}],"event":{"name":"2014 IEEE International Conference on Automation Science and Engineering (CASE)","location":"Taipei","start":{"date-parts":[[2014,8,18]]},"end":{"date-parts":[[2014,8,22]]}},"container-title":["2014 IEEE International Conference on Automation Science and Engineering (CASE)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6892922\/6899294\/06899307.pdf?arnumber=6899307","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,22]],"date-time":"2017-06-22T23:58:08Z","timestamp":1498175888000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6899307\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,8]]},"references-count":19,"URL":"https:\/\/doi.org\/10.1109\/coase.2014.6899307","relation":{},"subject":[],"published":{"date-parts":[[2014,8]]}}}