{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,13]],"date-time":"2026-05-13T16:19:12Z","timestamp":1778689152526,"version":"3.51.4"},"reference-count":44,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2014,8]]},"DOI":"10.1109\/coase.2014.6899310","type":"proceedings-article","created":{"date-parts":[[2014,11,11]],"date-time":"2014-11-11T19:28:58Z","timestamp":1415734138000},"page":"93-98","source":"Crossref","is-referenced-by-count":3,"title":["Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook"],"prefix":"10.1109","author":[{"given":"Claude","family":"Yugma","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jakey","family":"Blue","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Stephane","family":"Dauzere-Peres","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Philippe","family":"Vialletelle","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref39","doi-asserted-by":"publisher","DOI":"10.1109\/COASE.2007.4341746"},{"key":"ref38","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2007.907633"},{"key":"ref33","first-page":"399","article-title":"Introduction to Statistical Quality Control","author":"montgomery","year":"2009"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1002\/0471790281"},{"key":"ref31","first-page":"426","article-title":"Making the move to fab-wide APC","volume":"47","author":"su","year":"2004","journal-title":"Solid St Technol"},{"key":"ref30","first-page":"312","article-title":"A Capacity-Dependence Dynamic Sampling Strategy","author":"lee","year":"2003","journal-title":"Proceedings of the IEEE International Symposium on Semiconductor Manufacturing"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2012.2221087"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2011.2176759"},{"key":"ref35","first-page":"43","article-title":"Optimized sample planning for wafer detect inspection","author":"williams","year":"1999","journal-title":"Proceedings of the IEEE International Symposium on Semiconductor Manufacturing"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1109\/66.4384"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2007.907616"},{"key":"ref40","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2011.2169405"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/CoASE.2012.6386366"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2007.907613"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2010.5551470"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1007\/s10951-010-0215-8"},{"key":"ref15","first-page":"645","article-title":"Scheduling Job Families on Parallel Machines with a Bi-Criteria Objective Function under Time Constraints","author":"obeid","year":"2011","journal-title":"Proceedings of the Multidisciplinary International Conference on Scheduling Theory and Applications (MISTA)"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2007.907612"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1016\/j.jprocont.2008.04.011"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/TCHMT.1987.1134700"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2011.6147904"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.5923\/j.control.20120203.02"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1016\/j.conengprac.2006.11.003"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2013.2256943"},{"key":"ref3","first-page":"114","article-title":"Cramming More Components onto Integrated Circuits","volume":"38","author":"moore","year":"1965","journal-title":"Electronics"},{"key":"ref6","article-title":"SEMI, Equipment Engineering Capabilities Guidelines (Phase 2.5)","year":"2002","journal-title":"SEMI International Standards"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2012.2192476"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/S0005-1098(00)00084-4"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2008.4736302"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.1996.558084"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1007\/s10951-010-0222-9"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/ISSM.2007.4446804"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2007.907606"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/CoASE.2012.6386346"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1016\/j.cor.2011.06.006"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1007\/s10951-010-0203-z"},{"key":"ref42","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2005.1438762"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1080\/00207540600677617"},{"key":"ref41","doi-asserted-by":"publisher","DOI":"10.1080\/09537287.2010.490022"},{"key":"ref23","article-title":"Hierarchical monitor scheme for recipe-independent tool condition evaluation. One approach of EHF (Equipment Health Factor)","author":"gleispach","year":"2012","journal-title":"Proceedings of 12th European Advanced Process Control and Manufacturing Conference (APCM)"},{"key":"ref44","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2011.2178023"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2012.2230279"},{"key":"ref43","doi-asserted-by":"publisher","DOI":"10.1109\/ISSM.2007.4446829"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2008.4529062"}],"event":{"name":"2014 IEEE International Conference on Automation Science and Engineering (CASE)","location":"Taipei","start":{"date-parts":[[2014,8,18]]},"end":{"date-parts":[[2014,8,22]]}},"container-title":["2014 IEEE International Conference on Automation Science and Engineering (CASE)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6892922\/6899294\/06899310.pdf?arnumber=6899310","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,24]],"date-time":"2017-03-24T01:50:40Z","timestamp":1490320240000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6899310\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,8]]},"references-count":44,"URL":"https:\/\/doi.org\/10.1109\/coase.2014.6899310","relation":{},"subject":[],"published":{"date-parts":[[2014,8]]}}}