{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T23:59:32Z","timestamp":1729641572868,"version":"3.28.0"},"reference-count":12,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2015,8]]},"DOI":"10.1109\/coase.2015.7294094","type":"proceedings-article","created":{"date-parts":[[2015,10,8]],"date-time":"2015-10-08T17:56:58Z","timestamp":1444327018000},"page":"292-297","source":"Crossref","is-referenced-by-count":2,"title":["Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster tools"],"prefix":"10.1109","author":[{"given":"QingHua","family":"Zhu","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yan","family":"Qiao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"MengChu","family":"Zhou","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1016\/j.ejor.2004.09.019"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2006.879414"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/66.705370"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1080\/00207543.2013.774490"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2013.2278378"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2003.815203"},{"key":"ref12","doi-asserted-by":"crossref","first-page":"117","DOI":"10.1109\/TSM.2014.2375880","article-title":"Scheduling of Single-Arm Multi-cluster Tools With Wafer Residency Time Constraints in Semiconductor Manufacturing","volume":"28","author":"zhu","year":"2015","journal-title":"IEEE Trans Semiconduct Manufact"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/TSMC.2014.2327051"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2008.2000425"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2010.2046893"},{"key":"ref9","doi-asserted-by":"crossref","first-page":"321","DOI":"10.1109\/TASE.2007.906678","article-title":"Steady-State Throughput and Scheduling Analysis of Multi -Cluster Tools for Semiconductor Manufacturing: A Decomposition Approach","volume":"5","author":"yi","year":"2008","journal-title":"IEEE Trans Autom Sci Eng"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2010.2046891"}],"event":{"name":"2015 IEEE International Conference on Automation Science and Engineering (CASE)","start":{"date-parts":[[2015,8,24]]},"location":"Gothenburg, Sweden","end":{"date-parts":[[2015,8,28]]}},"container-title":["2015 IEEE International Conference on Automation Science and Engineering (CASE)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7279855\/7294025\/07294094.pdf?arnumber=7294094","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,23]],"date-time":"2017-06-23T17:00:19Z","timestamp":1498237219000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7294094\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,8]]},"references-count":12,"URL":"https:\/\/doi.org\/10.1109\/coase.2015.7294094","relation":{},"subject":[],"published":{"date-parts":[[2015,8]]}}}