{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,11]],"date-time":"2026-03-11T16:33:41Z","timestamp":1773246821491,"version":"3.50.1"},"reference-count":18,"publisher":"IEEE","license":[{"start":{"date-parts":[[2021,12,5]],"date-time":"2021-12-05T00:00:00Z","timestamp":1638662400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2021,12,5]],"date-time":"2021-12-05T00:00:00Z","timestamp":1638662400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,12,5]],"date-time":"2021-12-05T00:00:00Z","timestamp":1638662400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/100000001","name":"National Science Foundation","doi-asserted-by":"publisher","id":[{"id":"10.13039\/100000001","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2021,12,5]]},"DOI":"10.1109\/dac18074.2021.9586273","type":"proceedings-article","created":{"date-parts":[[2021,11,8]],"date-time":"2021-11-08T23:30:34Z","timestamp":1636414234000},"page":"907-912","source":"Crossref","is-referenced-by-count":10,"title":["Low-Cost Lithography Hotspot Detection with Active Entropy Sampling and Model Calibration"],"prefix":"10.1109","author":[{"given":"Yifeng","family":"Xiao","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Miaodi","family":"Su","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Haoyu","family":"Yang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jianli","family":"Chen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jun","family":"Yu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Bei","family":"Yu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/MMSP.2017.8122269"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/ICPR.2002.1047453"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1007\/s11263-014-0781-x"},{"key":"ref13","article-title":"Deep batch active learning by diverse,| uncertain gradient lower bounds","author":"ash","year":"2019","journal-title":"arXiv 1906 03671"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2020.3015903"},{"key":"ref15","first-page":"1321","article-title":"On calibration of modern neural networks","volume":"70","author":"guo","year":"2017","journal-title":"Proc ICML"},{"key":"ref16","first-page":"265","article-title":"Tensorflow: A system for largescale machine learning","author":"abadi","year":"2016","journal-title":"Proc OSDI"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1145\/2429384.2429457"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1145\/2966986.2980073"},{"key":"ref4","doi-asserted-by":"crossref","first-page":"94270s","DOI":"10.1117\/12.2085790","article-title":"A new lithography hotspot detection framework based on adaboost classifier and simplified feature extraction","volume":"9427","author":"matsunawa","year":"2015","journal-title":"Proc SPIE"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2014.2387858"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.16.3.033504"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.15.4.043507"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1117\/12.712491"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.18.1.013507"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1145\/3061639.3062283"},{"key":"ref1","first-page":"1545","article-title":"Improved tangent space-based distance metric for lithographic hotspot classification","volume":"36","author":"yang","year":"2016","journal-title":"IEEE TCAD"},{"key":"ref9","first-page":"1323","article-title":"Active learning with sampling by uncertainty and density for data annotations","volume":"18","author":"zhu","year":"2009","journal-title":"IEEE ASLP"}],"event":{"name":"2021 58th ACM\/IEEE Design Automation Conference (DAC)","location":"San Francisco, CA, USA","start":{"date-parts":[[2021,12,5]]},"end":{"date-parts":[[2021,12,9]]}},"container-title":["2021 58th ACM\/IEEE Design Automation Conference (DAC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9585997\/9586083\/09586273.pdf?arnumber=9586273","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,5,10]],"date-time":"2022-05-10T16:55:54Z","timestamp":1652201754000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9586273\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,12,5]]},"references-count":18,"URL":"https:\/\/doi.org\/10.1109\/dac18074.2021.9586273","relation":{},"subject":[],"published":{"date-parts":[[2021,12,5]]}}}