{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,8]],"date-time":"2024-09-08T04:01:10Z","timestamp":1725768070237},"reference-count":7,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/ddecs.2009.5012130","type":"proceedings-article","created":{"date-parts":[[2009,6,2]],"date-time":"2009-06-02T20:44:32Z","timestamp":1243975472000},"page":"210-213","source":"Crossref","is-referenced-by-count":2,"title":["Contactless characterization of MEMS devices using optical microscopy"],"prefix":"10.1109","author":[{"given":"Andras","family":"Timar","sequence":"first","affiliation":[]},{"given":"Gyorgy","family":"Bognar","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/IROS.2006.282641"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/ICIP.2006.312866"},{"journal-title":"Olympus BX51M System Metallurgical Microscope User's Guide","year":"2006","key":"1"},{"journal-title":"MEMS Imaging Solutions","year":"2008","key":"7"},{"journal-title":"Confocal Laser Scanning Microscope LEXT","year":"2008","key":"6"},{"journal-title":"How Autofocus Cameras Work","year":"2008","author":"brown","key":"5"},{"key":"4","first-page":"233","article-title":"thermal and thermo-mechanical characterization of movable structures","author":"bogna?r","year":"2005","journal-title":"Proc of IEEE Design Test Integration Packaging of MEMS Conference 2005"}],"event":{"name":"2009 12th International Symposium on Design and Diagnostics of Electronic Circuits & Systems","start":{"date-parts":[[2009,4,15]]},"location":"Liberec, Czech Republic","end":{"date-parts":[[2009,4,17]]}},"container-title":["2009 12th International Symposium on Design and Diagnostics of Electronic Circuits & Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4957849\/5012077\/05012130.pdf?arnumber=5012130","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,18]],"date-time":"2017-03-18T04:37:00Z","timestamp":1489811820000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5012130\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":7,"URL":"https:\/\/doi.org\/10.1109\/ddecs.2009.5012130","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}