{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T00:05:24Z","timestamp":1729641924239,"version":"3.28.0"},"reference-count":16,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2015,6]]},"DOI":"10.1109\/ecai.2015.7301233","type":"proceedings-article","created":{"date-parts":[[2015,10,26]],"date-time":"2015-10-26T22:15:02Z","timestamp":1445897702000},"page":"WF-5-WF-8","source":"Crossref","is-referenced-by-count":1,"title":["Finite element method design and analysis of a MEMS comb drive"],"prefix":"10.1109","author":[{"given":"Viorel","family":"Ionescu","sequence":"first","affiliation":[]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2007.10.004"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/CCECE.2006.277436"},{"key":"ref12","article-title":"MUMPs Design Handbook","author":"koester","year":"2001","journal-title":"Revision 7 0"},{"journal-title":"Mechanical Properties of MEMS Materials","year":"2001","key":"ref13"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.1992.752508"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2005.851837"},{"key":"ref16","doi-asserted-by":"crossref","first-page":"540","DOI":"10.1016\/j.sna.2005.03.031","article-title":"Simulation of shaped comb drive as a stepped actuator for microtweezers application","volume":"123?124","author":"harouche","year":"2005","journal-title":"Sensors and Actuators A"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-008-0593-4"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1115\/DETC2010-28943"},{"key":"ref6","doi-asserted-by":"crossref","first-page":"1337","DOI":"10.1109\/TIE.2003.819567","article-title":"New actuation method for push-pull electrostatic MEMS comb drive","volume":"50","author":"zao","year":"2003","journal-title":"IEEE Transactions on Industrial Electronics"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2003.809948"},{"key":"ref8","doi-asserted-by":"crossref","first-page":"1228","DOI":"10.1109\/TCAD.2003.816210","article-title":"Efficient Mixed-Domain Analysis of Electrostatic MEMS","volume":"22","author":"li","year":"2003","journal-title":"IEEE Transactions on Computer Aided Design of Integrated Circuits and Systems"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2008.2006934"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-006-0214-z"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/MWSCAS.2009.5235896"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/84.128056"}],"event":{"name":"2015 7th International Conference on Electronics, Computers and Artificial Intelligence (ECAI)","start":{"date-parts":[[2015,6,25]]},"location":"Bucharest, Romania","end":{"date-parts":[[2015,6,27]]}},"container-title":["2015 7th International Conference on Electronics, Computers and Artificial Intelligence (ECAI)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7297040\/7301133\/07301233.pdf?arnumber=7301233","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,23]],"date-time":"2017-06-23T22:15:38Z","timestamp":1498256138000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7301233\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,6]]},"references-count":16,"URL":"https:\/\/doi.org\/10.1109\/ecai.2015.7301233","relation":{},"subject":[],"published":{"date-parts":[[2015,6]]}}}