{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,4]],"date-time":"2024-09-04T06:42:55Z","timestamp":1725432175450},"reference-count":4,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2005]]},"DOI":"10.1109\/esscir.2005.1541631","type":"proceedings-article","created":{"date-parts":[[2005,12,10]],"date-time":"2005-12-10T20:49:09Z","timestamp":1134247749000},"page":"347-350","source":"Crossref","is-referenced-by-count":2,"title":["Electrical measurement of alignment for 3D stacked chips"],"prefix":"10.1109","author":[{"given":"R.","family":"Canegallo","sequence":"first","affiliation":[{"name":"STMicroelectronics, Agrate Brianza, Italy"}]},{"given":"M.","family":"Mirandola","sequence":"additional","affiliation":[]},{"given":"A.","family":"Fazzi","sequence":"additional","affiliation":[]},{"given":"L.","family":"Magagni","sequence":"additional","affiliation":[]},{"given":"R.","family":"Guerrieri","sequence":"additional","affiliation":[]},{"given":"K.","family":"Kaschlun","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/SENSOR.2003.1217058"},{"key":"2","article-title":"An-Ultra precision alignment system for Micro-machining","author":"neville","year":"0","journal-title":"IEEE KIT 2002"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/ISSCC.2003.1234260"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/ISSCC.2004.1332635"}],"event":{"name":"Proceedings of ESSCIRC 2005. 31st European Solid-State Circuits Conference","start":{"date-parts":[[2005,9,12]]},"location":"Grenoble, France","end":{"date-parts":[[2005,9,16]]}},"container-title":["Proceedings of the 31st European Solid-State Circuits Conference, 2005. ESSCIRC 2005."],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/10265\/32889\/01541631.pdf?arnumber=1541631","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,6,9]],"date-time":"2021-06-09T11:18:29Z","timestamp":1623237509000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/1541631\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2005]]},"references-count":4,"URL":"https:\/\/doi.org\/10.1109\/esscir.2005.1541631","relation":{},"subject":[],"published":{"date-parts":[[2005]]}}}