{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,6]],"date-time":"2025-10-06T19:27:08Z","timestamp":1759778828394},"reference-count":6,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,9]]},"DOI":"10.1109\/essderc.2012.6343353","type":"proceedings-article","created":{"date-parts":[[2012,11,15]],"date-time":"2012-11-15T12:06:42Z","timestamp":1352981202000},"page":"141-144","source":"Crossref","is-referenced-by-count":7,"title":["Manufacturing aspects of an ultra-thin chip technology"],"prefix":"10.1109","author":[{"given":"Evangelos A.","family":"Angelopoulos","sequence":"first","affiliation":[]},{"given":"Muhammad S.","family":"Al-Shahed","sequence":"additional","affiliation":[]},{"given":"Wolfgang","family":"Appel","sequence":"additional","affiliation":[]},{"given":"Stefan","family":"Endler","sequence":"additional","affiliation":[]},{"given":"Saleh","family":"Ferwana","sequence":"additional","affiliation":[]},{"given":"Christine","family":"Harendt","sequence":"additional","affiliation":[]},{"given":"Mahadi-Ul","family":"Hassan","sequence":"additional","affiliation":[]},{"given":"Horst","family":"Rempp","sequence":"additional","affiliation":[]},{"given":"Martin","family":"Zimmermann","sequence":"additional","affiliation":[]},{"given":"Joachim N.","family":"Burghartz","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/BIPOL.2005.1555192"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/ECTC.2008.4550176"},{"journal-title":"Ultra-thin Chip Technology and Applications","year":"2010","author":"burghartz","key":"1"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.2010.5703284"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2009.2010581"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1016\/j.microrel.2009.10.002"}],"event":{"name":"ESSDERC 2012 - 42nd European Solid State Device Research Conference","start":{"date-parts":[[2012,9,17]]},"location":"Bordeaux, France","end":{"date-parts":[[2012,9,21]]}},"container-title":["2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6331298\/6343319\/06343353.pdf?arnumber=6343353","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,21]],"date-time":"2017-03-21T18:52:14Z","timestamp":1490122334000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6343353\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,9]]},"references-count":6,"URL":"https:\/\/doi.org\/10.1109\/essderc.2012.6343353","relation":{},"subject":[],"published":{"date-parts":[[2012,9]]}}}