{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,7,12]],"date-time":"2025-07-12T01:19:17Z","timestamp":1752283157454},"reference-count":8,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2014,9]]},"DOI":"10.1109\/essderc.2014.6948759","type":"proceedings-article","created":{"date-parts":[[2014,11,12]],"date-time":"2014-11-12T17:53:35Z","timestamp":1415814815000},"page":"66-69","source":"Crossref","is-referenced-by-count":9,"title":["A 6.7 MHz nanoelectromechanical ring oscillator using curved cantilever switches coated with amorphous carbon"],"prefix":"10.1109","author":[{"given":"Christopher L.","family":"Ayala","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Daniel","family":"Grogg","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Antonios","family":"Bazigos","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Montserrat Fernandez-Bolanos","family":"Badia","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Urs T.","family":"Duerig","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Michel","family":"Despont","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Christoph","family":"Hagleitner","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2012.40"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/JPROC.2013.2252317"},{"journal-title":"International Technology Roadmap for Semiconductors","year":"2013","author":"emerging research devices (erd)","key":"1"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2010.2074370"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1088\/1367-2630\/14\/12\/123007"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2014.6765594"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/23\/2\/025024"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2014.2318199"}],"event":{"name":"ESSDERC 2014 - 44th European Solid State Device Research Conference","start":{"date-parts":[[2014,9,22]]},"location":"Venice Lido, Italy","end":{"date-parts":[[2014,9,26]]}},"container-title":["2014 44th European Solid State Device Research Conference (ESSDERC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6926646\/6948742\/06948759.pdf?arnumber=6948759","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,24]],"date-time":"2017-03-24T00:55:43Z","timestamp":1490316943000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6948759\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,9]]},"references-count":8,"URL":"https:\/\/doi.org\/10.1109\/essderc.2014.6948759","relation":{},"subject":[],"published":{"date-parts":[[2014,9]]}}}