{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,5]],"date-time":"2024-09-05T22:11:04Z","timestamp":1725574264737},"reference-count":4,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2015,9]]},"DOI":"10.1109\/essderc.2015.7324728","type":"proceedings-article","created":{"date-parts":[[2015,11,12]],"date-time":"2015-11-12T23:03:10Z","timestamp":1447369390000},"page":"122-125","source":"Crossref","is-referenced-by-count":0,"title":["High performance low A\/R poly PN diode for 20nm node PCRAM cell switch"],"prefix":"10.1109","author":[{"given":"Young Ho","family":"Lee","sequence":"first","affiliation":[]},{"given":"Min Yong","family":"Lee","sequence":"additional","affiliation":[]},{"given":"Seung","family":"Beom Baek","sequence":"additional","affiliation":[]},{"given":"Jong Chul","family":"Lee","sequence":"additional","affiliation":[]},{"given":"Su Jin","family":"Chae","sequence":"additional","affiliation":[]},{"given":"Hae Chan","family":"Park","sequence":"additional","affiliation":[]},{"given":"Byoung Ki","family":"Lee","sequence":"additional","affiliation":[]},{"given":"Hyeong Soo","family":"Kim","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1063\/1.3548469"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1116\/1.1784825"},{"key":"ref2","first-page":"3.3.1","article-title":"Highly productive PCRAM technology platform and full chip operation: Based on 4F2(84nm Pitch) cell scheme for 1Gb and beyond","author":"lee","year":"0","journal-title":"IEDM Technical Digest"},{"key":"ref1","article-title":"Cobalt Silicidation on Sub 100nm Hole Patterned Vertical Diode Formed by Silicon Epitaxial Growth and Its Electrical Properties","author":"yong lee","year":"0","journal-title":"2008 MRS Proceeding"}],"event":{"name":"ESSDERC 2015 - 45th European Solid-State Device Research Conference","start":{"date-parts":[[2015,9,14]]},"location":"Graz, Austria","end":{"date-parts":[[2015,9,18]]}},"container-title":["2015 45th European Solid State Device Research Conference (ESSDERC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7300344\/7324696\/07324728.pdf?arnumber=7324728","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,25]],"date-time":"2017-03-25T02:34:44Z","timestamp":1490409284000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7324728\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,9]]},"references-count":4,"URL":"https:\/\/doi.org\/10.1109\/essderc.2015.7324728","relation":{},"subject":[],"published":{"date-parts":[[2015,9]]}}}