{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,20]],"date-time":"2026-04-20T22:00:43Z","timestamp":1776722443789,"version":"3.51.2"},"reference-count":29,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2018,9]]},"DOI":"10.1109\/etfa.2018.8502480","type":"proceedings-article","created":{"date-parts":[[2018,11,15]],"date-time":"2018-11-15T22:20:08Z","timestamp":1542320408000},"page":"845-852","source":"Crossref","is-referenced-by-count":6,"title":["Predictive Modeling for Advanced Virtual Metrology: A Tree-Based Approach"],"prefix":"10.1109","author":[{"given":"Yang","family":"Liu","sequence":"first","affiliation":[]},{"given":"Xin","family":"Li","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/ETFA.2017.8247660"},{"key":"ref11","first-page":"380","article-title":"On regression methods for virtual metrology in semiconductor manufacturing","author":"wan","year":"2014","journal-title":"Proceedings of IET Irish Signals & Systems Conference 2014 and 2014 China-Ireland International Conference on Information and Communications"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2008.2001219"},{"key":"ref13","first-page":"230","article-title":"Developing a selection scheme for dual virtual-metrology outputs","author":"wu","year":"2008","journal-title":"Proc IEEE Int Conf Automation Science and Engineering"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2010.2089451"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2012.6212866"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2010.2061292"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2016.2594033"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2014.6847012"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1016\/S0031-3203(99)00041-2"},{"key":"ref28","author":"tan","year":"2006","journal-title":"Introduction to Data Mining"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2013.6552754"},{"key":"ref27","first-page":"281","article-title":"Some methods for classification and analysis of multivariate observations","author":"macqueen","year":"1967","journal-title":"Proceedings of Berkeley Symposium on Mathematical Statistics and Probability"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2007.907609"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2009.5155972"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1109\/ICTAI.2004.50"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/ETFA.2011.6059209"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2011.2176759"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/ICIT.2010.5472698"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2013.2273435"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/CASE.2011.6042425"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2007.897275"},{"key":"ref20","first-page":"509","article-title":"A stochastic algorithm for feature selection in pattern recognition","volume":"8","author":"gadat","year":"2007","journal-title":"Journal of Machine Learning Research"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1109\/34.75512"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1016\/j.patrec.2008.11.012"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1109\/TIT.2007.909108"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1109\/34.574797"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1109\/JSTSP.2011.2159773"},{"key":"ref25","author":"bishop","year":"2006","journal-title":"Pattern Recognition and Machine Learning"}],"event":{"name":"2018 IEEE 23rd International Conference on Emerging Technologies and Factory Automation (ETFA)","location":"Turin","start":{"date-parts":[[2018,9,4]]},"end":{"date-parts":[[2018,9,7]]}},"container-title":["2018 IEEE 23rd International Conference on Emerging Technologies and Factory Automation (ETFA)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8488382\/8502441\/08502480.pdf?arnumber=8502480","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2020,8,23]],"date-time":"2020-08-23T22:38:47Z","timestamp":1598222327000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8502480\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,9]]},"references-count":29,"URL":"https:\/\/doi.org\/10.1109\/etfa.2018.8502480","relation":{},"subject":[],"published":{"date-parts":[[2018,9]]}}}