{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T01:08:58Z","timestamp":1729645738461,"version":"3.28.0"},"reference-count":15,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,7]]},"DOI":"10.1109\/eurocon.2013.6625270","type":"proceedings-article","created":{"date-parts":[[2013,10,17]],"date-time":"2013-10-17T17:48:16Z","timestamp":1382032096000},"page":"2100-2105","source":"Crossref","is-referenced-by-count":4,"title":["Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass"],"prefix":"10.1109","author":[{"given":"Jean Marie","family":"Darmanin","sequence":"first","affiliation":[]},{"given":"Ivan","family":"Grech","sequence":"additional","affiliation":[]},{"given":"Joseph","family":"Micallef","sequence":"additional","affiliation":[]},{"given":"Edward","family":"Gatt","sequence":"additional","affiliation":[]},{"given":"Owen","family":"Casha","sequence":"additional","affiliation":[]},{"given":"Ansel","family":"Briffa","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"15","doi-asserted-by":"publisher","DOI":"10.1109\/TRANSDUCERS.2011.5969217"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.3390\/s100403835"},{"key":"14","article-title":"Design and analysis of a novel MEMS dual axis accelerometer","author":"he","year":"2012","journal-title":"Proc of 2012 ASEE (The American Society for Engineering Education) Northeast Section Conf"},{"journal-title":"Application Note 32 Cross-axis Compensation","year":"2005","key":"11"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2008.923582"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2003.823221"},{"key":"2","first-page":"22","article-title":"Sensors technology","author":"chollet","year":"2010","journal-title":"A (Not So) Short Introduction to MEMS"},{"key":"1","article-title":"Reliability challenges for MEMS integration","author":"vigna","year":"2006","journal-title":"Network of Excellence Design for Micro & Nano Manufacture Patent (DfMM)"},{"key":"10","first-page":"35","article-title":"Resonant loop design and performance test for a torsional MEMS accelerometer with differential pickoff","volume":"5","author":"sung","year":"2007","journal-title":"Control"},{"key":"7","doi-asserted-by":"crossref","first-page":"8","DOI":"10.1016\/j.sna.2004.06.033","article-title":"Development and analysis of the vertical capacitive accelerometer","volume":"119","author":"lee","year":"2005","journal-title":"Sensors and Actuators A Physical"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/ICECS.2011.6122265"},{"journal-title":"LIS3L02AQ DataSheet","article-title":"MEMS INERTIAL SENSOR: 3-axis - +\/-2g ultracompact linear accelerometer","year":"2006","key":"5"},{"key":"4","first-page":"769","article-title":"Residual stress monitoring of post-processed MEMS fixed-fixed beams","author":"starman","year":"2009","journal-title":"SEM 2009 Annual Conference & Exposition on Experimental & Applied Mechanics"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.1996.554092"},{"key":"8","first-page":"312","article-title":"Three-axis accelerometer in CMOS MEMS","author":"kuo","year":"2009","journal-title":"Microsystems Packaging Assembly and Circuits Technology Conference 2009"}],"event":{"name":"IEEE EUROCON 2013","start":{"date-parts":[[2013,7,1]]},"location":"Zagreb, Croatia","end":{"date-parts":[[2013,7,4]]}},"container-title":["Eurocon 2013"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6596534\/6624951\/06625270.pdf?arnumber=6625270","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,21]],"date-time":"2017-06-21T20:06:15Z","timestamp":1498075575000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6625270\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,7]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/eurocon.2013.6625270","relation":{},"subject":[],"published":{"date-parts":[[2013,7]]}}}