{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,8,21]],"date-time":"2025-08-21T18:27:12Z","timestamp":1755800832090},"reference-count":1,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2014,5]]},"DOI":"10.1109\/ewme.2014.6877420","type":"proceedings-article","created":{"date-parts":[[2014,8,20]],"date-time":"2014-08-20T15:06:55Z","timestamp":1408547215000},"page":"171-176","source":"Crossref","is-referenced-by-count":5,"title":["“MEMS de Piano”- an experimental course of design, fabrication, and testing of MEMS oscillator"],"prefix":"10.1109","author":[{"given":"Yoshio","family":"Mita","sequence":"first","affiliation":[]},{"given":"Masanori","family":"Kubota","sequence":"additional","affiliation":[]},{"given":"Matthieu","family":"Denoual","sequence":"additional","affiliation":[]},{"given":"Eric","family":"Lebrasseur","sequence":"additional","affiliation":[]},{"given":"Tomoki","family":"Sawamura","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"1","first-page":"193","article-title":"A musical instrument in mems","author":"engelen","year":"2010","journal-title":"Micromechanics and Microengineering Europe (MME"}],"event":{"name":"2014 10th European Workshop on Microelectronics Education (EWME)","start":{"date-parts":[[2014,5,14]]},"location":"Tallinn, Estonia","end":{"date-parts":[[2014,5,16]]}},"container-title":["10th European Workshop on Microelectronics Education (EWME)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6868743\/6877377\/06877420.pdf?arnumber=6877420","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,23]],"date-time":"2017-03-23T14:31:31Z","timestamp":1490279491000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6877420\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,5]]},"references-count":1,"URL":"https:\/\/doi.org\/10.1109\/ewme.2014.6877420","relation":{},"subject":[],"published":{"date-parts":[[2014,5]]}}}