{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,8,2]],"date-time":"2025-08-02T16:18:45Z","timestamp":1754151525694,"version":"3.41.2"},"reference-count":15,"publisher":"IEEE","license":[{"start":{"date-parts":[[2025,5,19]],"date-time":"2025-05-19T00:00:00Z","timestamp":1747612800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2025,5,19]],"date-time":"2025-05-19T00:00:00Z","timestamp":1747612800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100014583","name":"National Synchrotron Radiation Research Center","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100014583","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100020950","name":"National Science and Technology Council","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100020950","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2025,5,19]]},"DOI":"10.1109\/i2mtc62753.2025.11079069","type":"proceedings-article","created":{"date-parts":[[2025,7,18]],"date-time":"2025-07-18T17:42:33Z","timestamp":1752860553000},"page":"1-5","source":"Crossref","is-referenced-by-count":0,"title":["Eco-friendly, High-Resolution Fluorescence Diamond-Based Broadband EUV and X-Ray Beam Profiler System"],"prefix":"10.1109","author":[{"given":"Yu-Hsin","family":"Yang","sequence":"first","affiliation":[{"name":"National Taiwan University,Department of Electrical Engineering,Taipei,Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ya-Ting","family":"Kang","sequence":"additional","affiliation":[{"name":"National Chung Cheng University,Department of Physics,Chiayi,Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tzu-Ping","family":"Huang","sequence":"additional","affiliation":[{"name":"National Synchrotron Radiation Research Center,Hsinchu,Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yin-Yu","family":"Lee","sequence":"additional","affiliation":[{"name":"National Synchrotron Radiation Research Center,Hsinchu,Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yu-Chan","family":"Lin","sequence":"additional","affiliation":[{"name":"Academia Sinica,Institute of Atomic Molecular Sciences,Taipei,Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Pei-Jie","family":"Wu","sequence":"additional","affiliation":[{"name":"National Taiwan Normal University,Department of Chemistry,Taipei,Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guo-Hao","family":"Lu","sequence":"additional","affiliation":[{"name":"Taiwan Instrument Research Institute,Hsinchu,Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chun-Jen","family":"Weng","sequence":"additional","affiliation":[{"name":"Taiwan Instrument Research Institute,Hsinchu,Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chi-Hung","family":"Hwang","sequence":"additional","affiliation":[{"name":"Taiwan Instrument Research Institute,Hsinchu,Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wen-Tse","family":"Hsiao","sequence":"additional","affiliation":[{"name":"Taiwan Instrument Research Institute,Hsinchu,Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chi-Chung","family":"Kei","sequence":"additional","affiliation":[{"name":"Taiwan Instrument Research Institute,Hsinchu,Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wen-Hao","family":"Cho","sequence":"additional","affiliation":[{"name":"Taiwan Instrument Research Institute,Hsinchu,Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chan-Yuen","family":"Chang","sequence":"additional","affiliation":[{"name":"Taiwan Instrument Research Institute,Hsinchu,Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Huan-Cheng","family":"Chang","sequence":"additional","affiliation":[{"name":"Academia Sinica,Institute of Atomic Molecular Sciences,Taipei,Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Teng-I","family":"Yang","sequence":"additional","affiliation":[{"name":"Taiwan Instrument Research Institute,Hsinchu,Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1117\/12.2049276"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1116\/1.4826249"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1117\/12.2175842"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1063\/1.3097883"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.isci.2020.101145"},{"key":"ref6","doi-asserted-by":"crossref","first-page":"665","DOI":"10.1016\/B978-0-08-054721-3.50035-6","volume-title":"Handbook of Optical Constants of Solids","author":"Edwards","year":"1985"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1007\/978-1-4615-5247-5"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.9b18372"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1021\/acs.jpclett.2c03064"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1002\/ange.201707389"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.3c02472"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.2214\/AJR.14.13126"},{"key":"ref13","first-page":"665","volume-title":"Handbook of Optical Constants of Solids","author":"Palik","year":"1985"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevB.47.3517"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-662-04548-0"}],"event":{"name":"2025 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)","location":"Chemnitz, Germany","start":{"date-parts":[[2025,5,19]]},"end":{"date-parts":[[2025,5,22]]}},"container-title":["2025 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/11078887\/11078930\/11079069.pdf?arnumber=11079069","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,7,19]],"date-time":"2025-07-19T05:00:34Z","timestamp":1752901234000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/11079069\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025,5,19]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/i2mtc62753.2025.11079069","relation":{},"subject":[],"published":{"date-parts":[[2025,5,19]]}}}