{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,5,28]],"date-time":"2025-05-28T05:12:49Z","timestamp":1748409169055,"version":"3.28.0"},"reference-count":7,"publisher":"IEEE","license":[{"start":{"date-parts":[[2021,4,13]],"date-time":"2021-04-13T00:00:00Z","timestamp":1618272000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2021,4,13]],"date-time":"2021-04-13T00:00:00Z","timestamp":1618272000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,4,13]],"date-time":"2021-04-13T00:00:00Z","timestamp":1618272000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2021,4,13]]},"DOI":"10.1109\/icaiic51459.2021.9415241","type":"proceedings-article","created":{"date-parts":[[2021,4,29]],"date-time":"2021-04-29T15:58:03Z","timestamp":1619711883000},"page":"488-491","source":"Crossref","is-referenced-by-count":2,"title":["A Chemical Monitoring and Prediction System in Semiconductor Manufacturing Process Using Bigdata and AI Techniques"],"prefix":"10.1109","author":[{"given":"Hyung-Min","family":"Cho","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kyung-Hee","family":"Lee","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Peter","family":"Shim","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Anthony","family":"Park","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","article-title":"In-Situ Chemical Monitoring in Semiconductor Fabrication Chemical Supplies","author":"moseman","year":"0","journal-title":"NXP Semiconductors Report"},{"key":"ref3","first-page":"5","article-title":"Realtime chemical monitoring system using RGB sensor toward PCB manufacturing","volume":"21","author":"ahn","year":"2008","journal-title":"Journal of KIEE"},{"year":"0","key":"ref6"},{"year":"0","key":"ref5"},{"year":"0","key":"ref7"},{"key":"ref2","article-title":"Inclusive Monitoring System for Process and Equipment State","volume":"18","author":"jeong","year":"2015","journal-title":"Prospectives of Industrial Chemistry"},{"journal-title":"Thermo Fisher Scientific","year":"0","key":"ref1"}],"event":{"name":"2021 International Conference on Artificial Intelligence in Information and Communication (ICAIIC)","start":{"date-parts":[[2021,4,13]]},"location":"Jeju Island, Korea (South)","end":{"date-parts":[[2021,4,16]]}},"container-title":["2021 International Conference on Artificial Intelligence in Information and Communication (ICAIIC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9415178\/9415179\/09415241.pdf?arnumber=9415241","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,5,10]],"date-time":"2022-05-10T11:41:03Z","timestamp":1652182863000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9415241\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,4,13]]},"references-count":7,"URL":"https:\/\/doi.org\/10.1109\/icaiic51459.2021.9415241","relation":{},"subject":[],"published":{"date-parts":[[2021,4,13]]}}}