{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T09:37:15Z","timestamp":1729676235259,"version":"3.28.0"},"reference-count":23,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2010,11]]},"DOI":"10.1109\/iccad.2010.5654304","type":"proceedings-article","created":{"date-parts":[[2010,12,11]],"date-time":"2010-12-11T03:29:13Z","timestamp":1292038153000},"page":"93-99","source":"Crossref","is-referenced-by-count":2,"title":["Design-aware mask inspection"],"prefix":"10.1109","author":[{"given":"Abde Ali","family":"Kagalwalla","sequence":"first","affiliation":[]},{"given":"Puneet","family":"Gupta","sequence":"additional","affiliation":[]},{"given":"Chris","family":"Progler","sequence":"additional","affiliation":[]},{"given":"Steve","family":"McDonald","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"19","doi-asserted-by":"publisher","DOI":"10.1117\/12.518211"},{"key":"22","first-page":"702821","volume":"7028","author":"tsuchiya","year":"2008","journal-title":"Die-to-database Mask Inspection with Variable Sensitivity"},{"key":"17","first-page":"898","volume":"4346","author":"karklin","year":"2001","journal-title":"Automatic Defect Severity Scoring for 193-nm Reticle Defect Inspection"},{"key":"23","doi-asserted-by":"publisher","DOI":"10.1117\/12.518071"},{"key":"18","volume":"7028","author":"moribe","year":"2008","journal-title":"Improvement of Image Quality and Inspection Speed in LM7500 Reticle Inspection System"},{"key":"15","first-page":"712207","volume":"7122","author":"hosono","year":"2008","journal-title":"PMJ Panel Discussion Overview on Mask Complexities Cost and Cycle Time in 32-nm System LSI Generation Conflict or Concurrent?"},{"key":"16","volume":"7122","author":"kang","year":"2008","journal-title":"Auto-classification and Simulation of Mask Defects Using SEM and CAD Images"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1109\/ISQED.2005.93"},{"key":"14","volume":"7122","author":"hedges","year":"2008","journal-title":"Novel Mask Inspection Flow Using Sensitivity Control Layers (SCL) on the Terascanhr-587 Platform"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/MCG.1983.262975"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1109\/DAC.2003.1218771"},{"key":"21","article-title":"Optimizing defect inspection strategy through the use of design-aware database control layers","volume":"6730","author":"stoler","year":"2007","journal-title":"SPIE"},{"year":"2008","key":"3"},{"key":"20","doi-asserted-by":"crossref","first-page":"426","DOI":"10.1007\/BF01933636","article-title":"The rectangle intersection problem revisited","volume":"20","author":"six","year":"1980","journal-title":"Bit Numerical Mathematics"},{"year":"0","key":"2"},{"year":"0","key":"1"},{"key":"10","volume":"6152","author":"du?rr","year":"2006","journal-title":"An Advanced Study for Defect Disposition Through 193-nm Aerial Imaging"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2005.853710"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/ICCAD.2008.4681617"},{"year":"2009","key":"5"},{"year":"2008","key":"4"},{"key":"9","first-page":"712222","volume":"7122","author":"driessen","year":"2008","journal-title":"Flexible Sensitivity Inspection with TK-CMI Software for Criticalityawareness"},{"key":"8","volume":"7122","author":"dayal","year":"2008","journal-title":"Results from the KLA-Tencor TerascanXR Reticle Inspection Tool"}],"event":{"name":"2010 IEEE\/ACM International Conference on Computer-Aided Design (ICCAD)","start":{"date-parts":[[2010,11,7]]},"location":"San Jose, CA, USA","end":{"date-parts":[[2010,11,11]]}},"container-title":["2010 IEEE\/ACM International Conference on Computer-Aided Design (ICCAD)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/5638200\/5648785\/05654304.pdf?arnumber=5654304","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,19]],"date-time":"2017-06-19T17:08:14Z","timestamp":1497892094000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5654304\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,11]]},"references-count":23,"URL":"https:\/\/doi.org\/10.1109\/iccad.2010.5654304","relation":{},"subject":[],"published":{"date-parts":[[2010,11]]}}}