{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T00:32:36Z","timestamp":1729643556156,"version":"3.28.0"},"reference-count":16,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009,10]]},"DOI":"10.1109\/iccd.2009.5413181","type":"proceedings-article","created":{"date-parts":[[2010,2,17]],"date-time":"2010-02-17T13:35:32Z","timestamp":1266413732000},"page":"29-34","source":"Crossref","is-referenced-by-count":0,"title":["Statistical timing analysis based on simulation of lithographic process"],"prefix":"10.1109","author":[{"given":"Aswin","family":"Sreedhar","sequence":"first","affiliation":[]},{"given":"Sandip","family":"Kundu","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","first-page":"799","article-title":"Subwavelength Lithography and its Potential Impact on Design and EDA","author":"kahng","year":"1999","journal-title":"Proc ACM\/IEEE DAC"},{"key":"ref11","doi-asserted-by":"crossref","DOI":"10.1117\/12.475673","article-title":"Impact of Subwavelength CD Tolerance on Device Performance","volume":"4692","author":"balasinski","year":"2002","journal-title":"Proc SPIE"},{"key":"ref12","first-page":"321","article-title":"Toward a systematic-variation aware timing methodology","author":"gupta","year":"2004","journal-title":"Proceedings 41st Design Automation Conference 2004 DAC"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/ICCD.2007.4601884"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1145\/1146909.1147111"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1145\/1065579.1065676"},{"key":"ref16","doi-asserted-by":"crossref","first-page":"435","DOI":"10.1117\/12.209274","article-title":"Yield modeling and enhancement for optical lithography","volume":"2440","author":"charrier","year":"1995","journal-title":"Proc SPIE"},{"key":"ref4","first-page":"71","article-title":"Parameterized Block-based Statistical Timing Analysis with Non-Gaussian Parameters, Nonlinear Delay Functions","author":"chang","year":"2005","journal-title":"Proc DAC"},{"key":"ref3","first-page":"556","article-title":"A General Probabilistic Framework for Worst Case Timing Analysis","author":"orshansky","year":"2002","journal-title":"Proc DAC"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1007\/s10820-006-9044-7"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/ICCAD.2000.896452"},{"article-title":"Fundamental Principles of Optical Lithography","year":"2008","author":"mack","key":"ref8"},{"key":"ref7","article-title":"Design for Manufacturing in the Sub-100nm Era","author":"blaauw","year":"0","journal-title":"Tutorial of Design Automation Conference"},{"year":"2006","key":"ref2","article-title":"International Technology Roadmap for Semiconductors (ITRS)"},{"key":"ref1","doi-asserted-by":"crossref","first-page":"343","DOI":"10.1145\/775832.775921","article-title":"Death, Taxes and Falling Chips","author":"visweswariah","year":"2003","journal-title":"Proc Design Automation Conference"},{"key":"ref9","article-title":"Resolution enhancement technology: The past, the present and extension for the future","author":"schellenberg","year":"2004","journal-title":"SPIE Microlithography Symposium"}],"event":{"name":"2009 IEEE International Conference on Computer Design (ICCD 2009)","start":{"date-parts":[[2009,10,4]]},"location":"Lake Tahoe, CA, USA","end":{"date-parts":[[2009,10,7]]}},"container-title":["2009 IEEE International Conference on Computer Design"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/5406656\/5413104\/05413181.pdf?arnumber=5413181","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,10,23]],"date-time":"2021-10-23T01:19:06Z","timestamp":1634951946000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5413181\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009,10]]},"references-count":16,"URL":"https:\/\/doi.org\/10.1109\/iccd.2009.5413181","relation":{},"subject":[],"published":{"date-parts":[[2009,10]]}}}