{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T18:24:37Z","timestamp":1729621477220,"version":"3.28.0"},"reference-count":13,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"DOI":"10.1109\/icecs.2004.1399720","type":"proceedings-article","created":{"date-parts":[[2005,3,31]],"date-time":"2005-03-31T18:26:51Z","timestamp":1112293611000},"page":"471-474","source":"Crossref","is-referenced-by-count":1,"title":["A novel design and fabrication method of a pyramidal shape chip for scanning micro mirror"],"prefix":"10.1109","author":[{"given":"O.","family":"Cohen","sequence":"first","affiliation":[]},{"given":"A.","family":"Shai","sequence":"additional","affiliation":[]},{"given":"Y.","family":"Nemirovsky","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"13","doi-asserted-by":"publisher","DOI":"10.1116\/1.576513"},{"key":"11","doi-asserted-by":"crossref","first-page":"1178","DOI":"10.1109\/T-ED.1978.19249","article-title":"fabrication of novel three-dimensional microstructures by the anisotropic etching of","volume":"25","author":"bassous","year":"1978","journal-title":"IEEE Transactions on Electron Devices"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1109\/T-ED.1978.19250"},{"key":"3","doi-asserted-by":"crossref","first-page":"223","DOI":"10.1016\/S0924-4247(01)00774-9","article-title":"Design and fabrication of scanning mirror for laser display","volume":"96","author":"lee","year":"2002","journal-title":"Sensors and Actuators A"},{"key":"2","doi-asserted-by":"crossref","DOI":"10.1117\/12.396487","article-title":"Performance of a biaxial MEMS-based scanner for microdisplay applications","volume":"4178","author":"wine","year":"2000","journal-title":"Proc SPIE"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(98)00288-X"},{"key":"10","doi-asserted-by":"crossref","first-page":"229","DOI":"10.1016\/0924-4247(95)00992-2","article-title":"Silicon anisotropic etching in KOH-isopropanol etchant","volume":"a48","author":"barycka","year":"1995","journal-title":"Sensors & Actuators"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/ICECS.2004.1399719"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/13\/3\/306"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/SENSOR.1997.613585"},{"key":"4","first-page":"645","article-title":"Fabrication, simulation and experiment of a rotating electrostatic silicon mirror with large angular deflection","author":"henri","year":"2000","journal-title":"Proc MEMS 00"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1109\/84.967384"},{"key":"8","doi-asserted-by":"crossref","DOI":"10.1117\/12.344656","article-title":"Scanner design and resolution tradeoffs for miniature scanning displays","volume":"3636","author":"urey","year":"1999","journal-title":"SPIE Proceeding"}],"event":{"name":"2004 11th IEEE International Conference on Electronics, Circuits and Systems, 2004. ICECS 2004.","location":"Tel Aviv, Israel"},"container-title":["Proceedings of the 2004 11th IEEE International Conference on Electronics, Circuits and Systems, 2004. ICECS 2004."],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/9627\/30421\/01399720.pdf?arnumber=1399720","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,16]],"date-time":"2017-06-16T17:51:06Z","timestamp":1497635466000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1399720\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[null]]},"references-count":13,"URL":"https:\/\/doi.org\/10.1109\/icecs.2004.1399720","relation":{},"subject":[]}}