{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T19:35:06Z","timestamp":1729625706611,"version":"3.28.0"},"reference-count":15,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009,12]]},"DOI":"10.1109\/icecs.2009.5410846","type":"proceedings-article","created":{"date-parts":[[2010,2,17]],"date-time":"2010-02-17T15:26:26Z","timestamp":1266420386000},"page":"583-586","source":"Crossref","is-referenced-by-count":7,"title":["A MEMS-based vacuum sensor with a PLL frequency-to-voltage converter"],"prefix":"10.1109","author":[{"given":"K.","family":"Allidina","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"M. A.","family":"Taghvaei","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"F.","family":"Nabki","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"P.-V.","family":"Cicek","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"M. N.","family":"El-Gamal","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/14\/10\/003"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/CICC.2006.320843"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/ISCAS.2008.4541670"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/4.735547"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/ISCAS.1999.780807"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2004.839650"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/AIM.2003.1225139"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/SENSOR.1991.148968"},{"key":"ref6","first-page":"373","article-title":"High-speed differential frequency-to-voltage converter","author":"bui","year":"2005","journal-title":"IEEE North-East Workshop on Circuits and Systems"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/IMTC.2003.1207988"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.1976.1050827"},{"journal-title":"Texas Instruments","article-title":"VFC32 frequency-to-voltage converter datasheet","year":"2009","key":"ref7"},{"key":"ref2","doi-asserted-by":"crossref","first-page":"86","DOI":"10.1016\/0924-4247(96)80130-0","article-title":"A laterally driven micromachined resonant pressure sensor","volume":"52","author":"welham","year":"1996","journal-title":"Sensors and Actuators A Physical"},{"article-title":"Series 902 absolute piezo transducer datasheet","year":"2009","author":"instruments","key":"ref1"},{"key":"ref9","doi-asserted-by":"crossref","DOI":"10.31438\/trf.hh2008.57","article-title":"Low-Temperature (<300&#x00B0;C) Low-Stress Silicon Carbide Surface Micromachining Fabrication Technology","author":"nabki","year":"2008","journal-title":"Hilton Head Workshop 2008 A Solid-State Sensors Actuators and Microsystems Workshop"}],"event":{"name":"2009 16th IEEE International Conference on Electronics, Circuits and Systems - (ICECS 2009)","start":{"date-parts":[[2009,12,13]]},"location":"Yasmine Hammamet, Tunisia","end":{"date-parts":[[2009,12,16]]}},"container-title":["2009 16th IEEE International Conference on Electronics, Circuits and Systems - (ICECS 2009)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/5403223\/5410749\/05410846.pdf?arnumber=5410846","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2019,5,25]],"date-time":"2019-05-25T21:09:33Z","timestamp":1558818573000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5410846\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009,12]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/icecs.2009.5410846","relation":{},"subject":[],"published":{"date-parts":[[2009,12]]}}}