{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T20:54:47Z","timestamp":1729630487397,"version":"3.28.0"},"reference-count":15,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009,12]]},"DOI":"10.1109\/icecs.2009.5410976","type":"proceedings-article","created":{"date-parts":[[2010,2,17]],"date-time":"2010-02-17T20:26:26Z","timestamp":1266438386000},"page":"223-226","source":"Crossref","is-referenced-by-count":1,"title":["Low actuation voltage silicon carbide RF switches for MEMS above IC"],"prefix":"10.1109","author":[{"given":"P.-V.","family":"Cicek","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"S.","family":"Mahdavi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"F.","family":"Nabki","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"M. N.","family":"El-Gamal","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/CICC.2008.4672055"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/CICC.2008.4672054"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/APS.2008.4619927"},{"key":"ref13","article-title":"MEMS and microsystems design and manufacturing","author":"hsu","year":"2002","journal-title":"McGraw-Hill"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2003.819170"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1016\/S1359-6462(99)00198-0"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1063\/1.2746056"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/SMIC.2001.942339"},{"journal-title":"MEMScAP","article-title":"PolyMUMPs design handbook","year":"2005","key":"ref6"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/SENSOR.2003.1217115"},{"key":"ref8","doi-asserted-by":"crossref","first-page":"210","DOI":"10.1016\/S0924-4247(99)00335-0","article-title":"Silicon carbide as a new MEMS technology","volume":"82","author":"sarro","year":"2000","journal-title":"Sensors and Actuators A Physical"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/j.sse.2008.06.004"},{"article-title":"Post-processing techniques for integrated MEMS","year":"2005","author":"sedky","key":"ref2"},{"key":"ref1","first-page":"512","article-title":"A comparison between RF MEMS switches and semiconductor switches","author":"grant","year":"2004","journal-title":"Proc of MEMS NAND and Smart Systems"},{"key":"ref9","first-page":"216","article-title":"Low temperature (<300&#x00B0;C) low-stress silicon carbide surface micromachining fabrication technology","author":"nabki","year":"2008","journal-title":"Proc Solid-State Sensors Actuators and Microsystems Workshop Hilton Head Island"}],"event":{"name":"2009 16th IEEE International Conference on Electronics, Circuits and Systems - (ICECS 2009)","start":{"date-parts":[[2009,12,13]]},"location":"Yasmine Hammamet, Tunisia","end":{"date-parts":[[2009,12,16]]}},"container-title":["2009 16th IEEE International Conference on Electronics, Circuits and Systems - (ICECS 2009)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/5403223\/5410749\/05410976.pdf?arnumber=5410976","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,19]],"date-time":"2017-06-19T04:57:36Z","timestamp":1497848256000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5410976\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009,12]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/icecs.2009.5410976","relation":{},"subject":[],"published":{"date-parts":[[2009,12]]}}}