{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,29]],"date-time":"2024-10-29T22:21:15Z","timestamp":1730240475112,"version":"3.28.0"},"reference-count":17,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2018,12]]},"DOI":"10.1109\/icecs.2018.8617928","type":"proceedings-article","created":{"date-parts":[[2019,1,24]],"date-time":"2019-01-24T05:16:09Z","timestamp":1548306969000},"page":"301-304","source":"Crossref","is-referenced-by-count":2,"title":["Mechanical Solution for Out-of-Plane Sensitivity Enhancement of CMOS MEMS Convective Accelerometers"],"prefix":"10.1109","author":[{"given":"S.","family":"Abdellatif","sequence":"first","affiliation":[]},{"given":"B.","family":"Mezghani","sequence":"additional","affiliation":[]},{"given":"F.","family":"Tounisi","sequence":"additional","affiliation":[]},{"given":"F.","family":"Mailly","sequence":"additional","affiliation":[]},{"given":"P.","family":"Nouet","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"journal-title":"Convective Accelerometer and Inclinometer","year":"1996","author":"dao","key":"ref10"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2012.2189366"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2010.11.020"},{"key":"ref13","first-page":"1471","article-title":"CMOS implementation of a 3-axis thermal convective accelerometer","author":"mailly","year":"2014","journal-title":"SENSORS"},{"key":"ref14","doi-asserted-by":"crossref","first-page":"1867","DOI":"10.1007\/s00542-014-2254-0","article-title":"A new monolithic 3-axis thermal convective accelerometer: principle, design, fabrication and characterization","volume":"21","author":"nguyen","year":"2015","journal-title":"Microsystem Technologies"},{"key":"ref15","doi-asserted-by":"crossref","first-page":"78","DOI":"10.1016\/j.sna.2006.04.057","article-title":"Experimental and finite-element study of convective accelerometer on CMOS","volume":"132 1","author":"chaehoi","year":"2006","journal-title":"Sensors and Actuators A"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1016\/j.mejo.2013.06.006"},{"key":"ref17","doi-asserted-by":"crossref","first-page":"44","DOI":"10.1016\/j.sna.2011.05.029","article-title":"A dual axis CMOS micromachined convective thermal accelerometer","volume":"170","author":"garraud","year":"2011","journal-title":"Sensors and Actuators"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2008.03.015"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1016\/j.proeng.2011.12.160"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6439\/aa964d"},{"year":"0","key":"ref5"},{"journal-title":"Z-axis thermal accelerometer","year":"2005","author":"zhao","key":"ref8"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1063\/1.125803"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-014-2079-x"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2017.2710354"},{"journal-title":"Thermal Convection Accelerometer with Closed-loop Heater Control","year":"2004","author":"zhao","key":"ref9"}],"event":{"name":"2018 25th IEEE International Conference on Electronics, Circuits and Systems (ICECS)","start":{"date-parts":[[2018,12,9]]},"location":"Bordeaux","end":{"date-parts":[[2018,12,12]]}},"container-title":["2018 25th IEEE International Conference on Electronics, Circuits and Systems (ICECS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8599658\/8617837\/08617928.pdf?arnumber=8617928","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2020,8,23]],"date-time":"2020-08-23T22:10:50Z","timestamp":1598220650000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8617928\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,12]]},"references-count":17,"URL":"https:\/\/doi.org\/10.1109\/icecs.2018.8617928","relation":{},"subject":[],"published":{"date-parts":[[2018,12]]}}}