{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T23:56:07Z","timestamp":1729641367942,"version":"3.28.0"},"reference-count":10,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2011,10]]},"DOI":"10.1109\/iceee.2011.6106609","type":"proceedings-article","created":{"date-parts":[[2011,12,22]],"date-time":"2011-12-22T16:53:42Z","timestamp":1324572822000},"page":"1-4","source":"Crossref","is-referenced-by-count":0,"title":["Electronic properties of Ge&lt;inf&gt;y&lt;\/inf&gt;Si&lt;inf&gt;1&amp;#x2212;y&lt;\/inf&gt;:H films deposited by LF PECVD at low temperatures"],"prefix":"10.1109","author":[{"given":"I.","family":"Cosme","sequence":"first","affiliation":[]},{"given":"A.","family":"Kosarev","sequence":"additional","affiliation":[]},{"given":"F.","family":"Temoltzi","sequence":"additional","affiliation":[]},{"given":"A.","family":"Itzmoyotl","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1016\/j.jnoncrysol.2004.03.082"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1557\/PROC-664-A26.5.1"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1007\/s11664-007-0305-3"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1016\/S0927-0248(02)00072-7"},{"key":"7","doi-asserted-by":"crossref","first-page":"88","DOI":"10.1557\/jmr.2006.0013","article-title":"Silicongermanium films deposited by low frequency plasma-enhanced chemical vapor deposition: Effect of H2 and Ar dilution","volume":"21","author":"kosarev","year":"2006","journal-title":"J Mat Res"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1006\/jcph.1999.6224"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1016\/j.tsf.2006.11.100"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1557\/PROC-557-749"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1557\/PROC-0910-A13-05"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1016\/S0022-3093(98)00187-2"}],"event":{"name":"2011 8th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE 2011)","start":{"date-parts":[[2011,10,26]]},"location":"Merida City, Mexico","end":{"date-parts":[[2011,10,28]]}},"container-title":["2011 8th International Conference on Electrical Engineering, Computing Science and Automatic Control"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6094291\/6106064\/06106609.pdf?arnumber=6106609","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,20]],"date-time":"2017-06-20T07:44:56Z","timestamp":1497944696000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6106609\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2011,10]]},"references-count":10,"URL":"https:\/\/doi.org\/10.1109\/iceee.2011.6106609","relation":{},"subject":[],"published":{"date-parts":[[2011,10]]}}}