{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T20:47:28Z","timestamp":1729630048354,"version":"3.28.0"},"reference-count":12,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2015,10]]},"DOI":"10.1109\/iceee.2015.7357813","type":"proceedings-article","created":{"date-parts":[[2015,12,17]],"date-time":"2015-12-17T17:00:07Z","timestamp":1450371607000},"page":"1-3","source":"Crossref","is-referenced-by-count":1,"title":["SIMS analysis of atomic composition of silicon-germanium films deposited by RF plasma discharge"],"prefix":"10.1109","author":[{"given":"H.E.","family":"Martinez","sequence":"first","affiliation":[]},{"given":"A.","family":"Kosarev","sequence":"additional","affiliation":[]},{"given":"Y.","family":"Kudriavtsev","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"crossref","DOI":"10.1016\/S1386-9477(02)00642-2","article-title":"A germanium photodetector array for the near infraredmonolithically integrated with silicon CMOS readout electronics","volume":"16","author":"masini","year":"2003","journal-title":"Physica E"},{"key":"ref3","doi-asserted-by":"crossref","DOI":"10.1143\/JJAP.37.6322","article-title":"Investigation of hydrogened amorphous silicon germanium fabricated under high dydrogen dilution and low depoistion temperature conditions for stable solar cells","volume":"37","author":"shima","year":"1998","journal-title":"Jpn J Appl Phys"},{"key":"ref10","first-page":"a18.3","article-title":"Properties of amorphous silicongermanium films and devices deposited at higher growth rates","author":"liu","year":"0","journal-title":"inAmorphous and Heterogeneous Silicon Based Films-2002"},{"key":"ref6","first-page":"338","article-title":"IR bolometersbased on amorphous silicon germanium alloys","volume":"744","author":"garcia","year":"2004","journal-title":"J Non-Cryst Solids"},{"key":"ref11","volume":"81","author":"wickboldt","year":"1997","journal-title":"High performance glow discharge a-S 1-x Ge x H of large x J Appl Phys"},{"key":"ref5","doi-asserted-by":"crossref","DOI":"10.1016\/j.jnoncrysol.2003.08.037","article-title":"Uncooledmicro-bolometer based on amorphous germanium film","volume":"329","author":"torres","year":"2003","journal-title":"J Non-Cryst Solids"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/ICEEE.2015.7357905"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/S0022-3093(98)00187-2"},{"key":"ref7","doi-asserted-by":"crossref","first-page":"134","DOI":"10.1016\/j.jnoncrysol.2003.08.027","article-title":"Silicon-germanium films deposited by low-frequency plasma-enhanced chemical vapor deposition: Effect of H 2 and Ar dilution","volume":"329","author":"kosarev","year":"2003","journal-title":"Journal of Non-Crystalline Solids"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/S0927-0248(02)00069-7"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevB.31.2198"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/S0927-0248(02)00076-4"}],"event":{"name":"2015 12th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)","start":{"date-parts":[[2015,10,28]]},"location":"Mexico City, Mexico","end":{"date-parts":[[2015,10,30]]}},"container-title":["2015 12th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7347854\/7357811\/07357813.pdf?arnumber=7357813","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,23]],"date-time":"2017-06-23T21:56:54Z","timestamp":1498255014000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7357813\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,10]]},"references-count":12,"URL":"https:\/\/doi.org\/10.1109\/iceee.2015.7357813","relation":{},"subject":[],"published":{"date-parts":[[2015,10]]}}}