{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,2,21]],"date-time":"2025-02-21T05:32:42Z","timestamp":1740115962611,"version":"3.37.3"},"reference-count":14,"publisher":"IEEE","license":[{"start":{"date-parts":[[2025,1,19]],"date-time":"2025-01-19T00:00:00Z","timestamp":1737244800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2025,1,19]],"date-time":"2025-01-19T00:00:00Z","timestamp":1737244800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2025,1,19]]},"DOI":"10.1109\/iceic64972.2025.10879638","type":"proceedings-article","created":{"date-parts":[[2025,2,18]],"date-time":"2025-02-18T18:17:22Z","timestamp":1739902642000},"page":"1-4","source":"Crossref","is-referenced-by-count":0,"title":["Monitoring Semiconductor Residue Deposits Using Graph Neural Networks"],"prefix":"10.1109","author":[{"given":"Minho","family":"Jeon","sequence":"first","affiliation":[{"name":"Jeju National University,Department of Electronics engineering,Jeju,Korea"}]},{"given":"Anil Kumar","family":"Khambampati","sequence":"additional","affiliation":[{"name":"Jeju National University,Department of Electronics engineering,Jeju,Korea"}]},{"given":"Keun Joong","family":"Yoon","sequence":"additional","affiliation":[{"name":"Prosen Inc,Incheon Metropolitan City,Korea"}]},{"given":"Jong Hyun","family":"Song","sequence":"additional","affiliation":[{"name":"KAIST Affiliated National Nano Fab Center,Nano Process Technology Department,Daejeon,Korea"}]},{"given":"Seok Jun","family":"Ko","sequence":"additional","affiliation":[{"name":"Jeju National University,Department of Electronics engineering,Jeju,Korea"}]},{"given":"Kyung Youn","family":"Kim","sequence":"additional","affiliation":[{"name":"Jeju National University,Department of Electronics engineering,Jeju,Korea"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1002\/0471790281"},{"key":"ref2","article-title":"Method for preventing clogging of reaction chamber exhaust lines","author":"Yoo","year":"2008","journal-title":"U.S. Patent Application No. 11\/466,922."},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1016\/S0894-1777(01)00117-0"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/jlt.2015.2394788"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/S0955-5986(03)00020-7"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1117\/1.1377308"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/j.jiec.2014.01.044"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/j.neucom.2017.08.006"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/TNN.2008.2005605"},{"volume-title":"Semi-Supervised Classification with Graph Convolution Network","author":"Thomas","key":"ref10"},{"key":"ref11","first-page":"1263","article-title":"Neural Message Passing for Quantum Chemistry","volume-title":"Proceedings of the 34th International Conference on Machine Learning","volume":"70","author":"Gilmer","year":"2017"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1177\/002029409502800901"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1088\/0957-0233\/14\/1\/201"},{"key":"ref14","article-title":"Mixing ADAM and SGD: a Combined Optimization Method","author":"Landro","year":"2020","journal-title":"arXiv"}],"event":{"name":"2025 International Conference on Electronics, Information, and Communication (ICEIC)","start":{"date-parts":[[2025,1,19]]},"location":"Osaka, Japan","end":{"date-parts":[[2025,1,22]]}},"container-title":["2025 International Conference on Electronics, Information, and Communication (ICEIC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/10879455\/10879601\/10879638.pdf?arnumber=10879638","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,2,20]],"date-time":"2025-02-20T20:01:16Z","timestamp":1740081676000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10879638\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025,1,19]]},"references-count":14,"URL":"https:\/\/doi.org\/10.1109\/iceic64972.2025.10879638","relation":{},"subject":[],"published":{"date-parts":[[2025,1,19]]}}}