{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,8]],"date-time":"2024-09-08T01:24:02Z","timestamp":1725758642933},"reference-count":36,"publisher":"IEEE","license":[{"start":{"date-parts":[[2019,3,1]],"date-time":"2019-03-01T00:00:00Z","timestamp":1551398400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2019,3,1]],"date-time":"2019-03-01T00:00:00Z","timestamp":1551398400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2019,3,1]],"date-time":"2019-03-01T00:00:00Z","timestamp":1551398400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2019,3]]},"DOI":"10.1109\/icmech.2019.8722885","type":"proceedings-article","created":{"date-parts":[[2019,5,27]],"date-time":"2019-05-27T23:38:45Z","timestamp":1559000325000},"page":"123-128","source":"Crossref","is-referenced-by-count":1,"title":["Active Cantilevers with Diamond-Tip for Field Emission Scanning Probe Lithography and Imaging"],"prefix":"10.1109","author":[{"given":"Martin","family":"Hofmann","sequence":"first","affiliation":[]},{"given":"Stephan","family":"Mechold","sequence":"additional","affiliation":[]},{"given":"Mathias","family":"Holz","sequence":"additional","affiliation":[]},{"given":"Ahmad","family":"Ahmad","sequence":"additional","affiliation":[]},{"given":"Tzvetan","family":"Ivanonv","sequence":"additional","affiliation":[]},{"given":"Ivo W.","family":"Rangelow","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref33","doi-asserted-by":"publisher","DOI":"10.1038\/srep10631"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1016\/S0169-4332(99)00058-6"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1039\/C4NR07171A"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.14.3.031202"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.12.3.031111"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1016\/j.susc.2006.05.008"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1002\/tee.20143"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1021\/jp400433u"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1116\/1.571062"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1002\/elan.201500630"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.100.235502"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1007\/s40735-018-0144-1"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1116\/1.5048193"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/24\/1\/015305"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1016\/0167-9317(94)90174-0"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1016\/0040-6090(94)05829-6"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.14.3.031209"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1116\/1.588007"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2018.01.022"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1116\/1.577364"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1063\/1.5050773"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.14.3.031202"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1116\/1.5048357"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2006.01.199"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2016.01.005"},{"key":"ref7","first-page":"868017","author":"durrani","year":"2013","journal-title":"Scanning probe lithography approach for beyond CMOS devices"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/5.752518"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1116\/1.4966556"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/ICEEICT.2015.7307337"},{"journal-title":"Self-actuated self-sensing cantilever for fast CD measurement","year":"2015","author":"ahmad","key":"ref20"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1116\/1.4897500"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1016\/S0304-3991(03)00064-0"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1109\/ACC.2015.7171011"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1063\/1.4897141"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1116\/1.581759"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1063\/1.99382"}],"event":{"name":"2019 IEEE International Conference on Mechatronics (ICM)","start":{"date-parts":[[2019,3,18]]},"location":"Ilmenau, Germany","end":{"date-parts":[[2019,3,20]]}},"container-title":["2019 IEEE International Conference on Mechatronics (ICM)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8712112\/8722827\/08722885.pdf?arnumber=8722885","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,7,15]],"date-time":"2022-07-15T03:23:16Z","timestamp":1657855396000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8722885\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,3]]},"references-count":36,"URL":"https:\/\/doi.org\/10.1109\/icmech.2019.8722885","relation":{},"subject":[],"published":{"date-parts":[[2019,3]]}}}