{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,4]],"date-time":"2024-09-04T15:01:59Z","timestamp":1725462119532},"reference-count":0,"publisher":"IEEE Comput. Soc","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"DOI":"10.1109\/icmens.2003.1221980","type":"proceedings-article","created":{"date-parts":[[2004,5,6]],"date-time":"2004-05-06T16:18:03Z","timestamp":1083860283000},"page":"131","source":"Crossref","is-referenced-by-count":1,"title":["Novel backend singulation techniques to enable commercialization of optical MEMS"],"prefix":"10.1109","author":[{"given":"J.","family":"Aberson","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"P.","family":"Cusin","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"J.","family":"Wylde","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"R.","family":"Hickey","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"H.","family":"Fettig","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","event":{"name":"International Conference on MEMS, NANO and Smart Systems","acronym":"ICMENS-03","location":"Banff, Alta., Canada"},"container-title":["Proceedings International Conference on MEMS, NANO and Smart Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/8659\/27449\/01221980.pdf?arnumber=1221980","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,13]],"date-time":"2017-03-13T14:25:05Z","timestamp":1489415105000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1221980\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[null]]},"references-count":0,"URL":"https:\/\/doi.org\/10.1109\/icmens.2003.1221980","relation":{},"subject":[]}}