{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,25]],"date-time":"2026-02-25T11:58:08Z","timestamp":1772020688915,"version":"3.50.1"},"reference-count":11,"publisher":"IEEE Comput. Soc","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"DOI":"10.1109\/icmens.2003.1222013","type":"proceedings-article","created":{"date-parts":[[2004,5,6]],"date-time":"2004-05-06T20:18:03Z","timestamp":1083874683000},"page":"297-302","source":"Crossref","is-referenced-by-count":18,"title":["Nonlinear effects in MEMS capacitive microphone design"],"prefix":"10.1109","author":[{"given":"S.","family":"Chowdhury","sequence":"first","affiliation":[]},{"given":"M.","family":"Ahmadi","sequence":"additional","affiliation":[]},{"given":"W.C.","family":"Miller","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","article-title":"Microsystems Design","author":"senturia","year":"2000"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/84.735346"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/84.294323"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(96)01310-6"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/84.475551"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2002.1007398"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/84.585788"},{"key":"ref7","first-page":"397","author":"timoshenko","year":"1959","journal-title":"Theory of Plates and Shells"},{"key":"ref2","first-page":"580","article-title":"A High Density Polysilicon Diaphragm Condenser Microphone","author":"hsu","year":"0"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.1999.746846"},{"key":"ref1","first-page":"1","article-title":"Design of A Biomimetic Directional Microphone Diaphragm","author":"gibbons","year":"2000","journal-title":"Proceedings of the ASME International Mechanical Engineering Congress and Exposition IMECE"}],"event":{"name":"International Conference on MEMS, NANO and Smart Systems","location":"Banff, Alta., Canada","acronym":"ICMENS-03"},"container-title":["Proceedings International Conference on MEMS, NANO and Smart Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/8659\/27449\/01222013.pdf?arnumber=1222013","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,13]],"date-time":"2017-03-13T18:02:29Z","timestamp":1489428149000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1222013\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[null]]},"references-count":11,"URL":"https:\/\/doi.org\/10.1109\/icmens.2003.1222013","relation":{},"subject":[]}}