{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,10]],"date-time":"2026-03-10T07:52:06Z","timestamp":1773129126228,"version":"3.50.1"},"reference-count":11,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"DOI":"10.1109\/icmens.2004.1508967","type":"proceedings-article","created":{"date-parts":[[2006,10,11]],"date-time":"2006-10-11T12:54:11Z","timestamp":1160571251000},"page":"315-321","source":"Crossref","is-referenced-by-count":5,"title":["Advanced MEMS and Integrated-Optic Components for Multifunctional Integrated Optical Micromachines"],"prefix":"10.1109","author":[{"given":"R.V.","family":"Kruzelecky","sequence":"first","affiliation":[]},{"given":"B.","family":"Wong","sequence":"additional","affiliation":[]},{"given":"J.","family":"Zou","sequence":"additional","affiliation":[]},{"given":"E.","family":"Haddad","sequence":"additional","affiliation":[]},{"given":"W.","family":"Jamroz","sequence":"additional","affiliation":[]},{"given":"A.","family":"Yelon","sequence":"additional","affiliation":[]},{"given":"R.","family":"Beaudry","sequence":"additional","affiliation":[]},{"given":"O.","family":"Grenier","sequence":"additional","affiliation":[]},{"given":"W.","family":"Zheng","sequence":"additional","affiliation":[]},{"given":"L.N.","family":"Phong","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/LEOS.2000.890672"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1117\/12.279013"},{"key":"10","doi-asserted-by":"crossref","first-page":"8837","DOI":"10.1088\/0953-8984\/12\/41\/310","volume":"12","author":"stefanovich","year":"2000","journal-title":"J Phys Condens Matter"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1063\/1.1146154"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/50.337489"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/2944.826871"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1116\/1.1722506"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.58.2059"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1063\/1.109645"},{"key":"8","first-page":"970","article-title":"Optoelectronic\/photonic integrated circuits on InP between technological feasibility and commercial success","volume":"e85","author":"kaiser","year":"2002","journal-title":"IEICE Trans Electron"},{"key":"11","doi-asserted-by":"crossref","DOI":"10.1103\/PhysRevLett.87.237401","article-title":"Femtosecond structural dynamics in VO2 during an ultrafast solid-solid phase transition","volume":"87","author":"cavalleri","year":"2001","journal-title":"Phys Rev Lett"}],"event":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","location":"Banff, AB, Canada"},"container-title":["2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/10085\/32318\/01508967.pdf?arnumber=1508967","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,17]],"date-time":"2017-06-17T06:09:09Z","timestamp":1497679749000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1508967\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[null]]},"references-count":11,"URL":"https:\/\/doi.org\/10.1109\/icmens.2004.1508967","relation":{},"subject":[]}}