{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,6,17]],"date-time":"2025-06-17T20:04:04Z","timestamp":1750190644141},"reference-count":13,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"DOI":"10.1109\/icmens.2004.1509003","type":"proceedings-article","created":{"date-parts":[[2006,10,11]],"date-time":"2006-10-11T16:54:11Z","timestamp":1160585651000},"page":"509-514","source":"Crossref","is-referenced-by-count":1,"title":["3D Modelling of MEMS Components for Coupled Elastic — Electrostatic Characterization"],"prefix":"10.1109","author":[{"given":"O.","family":"Sorasen","sequence":"first","affiliation":[]},{"given":"A.","family":"Vogl","sequence":"additional","affiliation":[]},{"family":"Xuyuan Chen","sequence":"additional","affiliation":[]},{"given":"L.","family":"Furuberg","sequence":"additional","affiliation":[]},{"given":"K.M.","family":"Johansen","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","article-title":"A splitted micro mirror for scanning applications","author":"soosaiappu","year":"2004","journal-title":"Micro Structure Workshop"},{"key":"ref11","doi-asserted-by":"crossref","DOI":"10.1007\/b117574","article-title":"Microsystem Design","author":"senturia","year":"2001"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/T-ED.1983.21093"},{"year":"0","key":"ref13"},{"year":"0","key":"ref4"},{"key":"ref3","article-title":"The System Designer's Guide to VHDL-AMS","author":"asheden","year":"2002","journal-title":"The Morgan Kaufmann Series in Systems on Silicon"},{"article-title":"The Boundary Element Method","year":"2002","author":"wrobel","key":"ref6"},{"article-title":"The Finite Element Method, linear static and dynamic Finite Element Analysis","year":"1987","author":"hughes","key":"ref5"},{"journal-title":"MultiMEMS MPW Process Design Handbook version 3 0 Company confidential SensoNor asa","year":"2003","key":"ref8"},{"year":"0","key":"ref7"},{"year":"0","key":"ref2"},{"article-title":"Micromachined Transducers Sourcebook","year":"1998","author":"kovacs","key":"ref1"},{"key":"ref9","article-title":"Computed electromechanical behavior of long, narrow silicon mirrors","author":"johansen","year":"2004","journal-title":"Micro Structure Workshop"}],"event":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","location":"Banff, AB, Canada"},"container-title":["2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/10085\/32318\/01509003.pdf?arnumber=1509003","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,2,7]],"date-time":"2024-02-07T09:17:48Z","timestamp":1707297468000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1509003\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[null]]},"references-count":13,"URL":"https:\/\/doi.org\/10.1109\/icmens.2004.1509003","relation":{},"subject":[]}}