{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,21]],"date-time":"2026-04-21T20:32:19Z","timestamp":1776803539883,"version":"3.51.2"},"reference-count":20,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2016,5]]},"DOI":"10.1109\/icosc.2016.7507082","type":"proceedings-article","created":{"date-parts":[[2016,8,11]],"date-time":"2016-08-11T20:30:55Z","timestamp":1470947455000},"page":"169-174","source":"Crossref","is-referenced-by-count":2,"title":["Virtual metrology on Chemical Mechanical Planarization process based on Just-In-Time Learning"],"prefix":"10.1109","author":[{"given":"M.A.","family":"Jebri","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"G.","family":"Graton","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"E.M.","family":"El Adel","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"M.","family":"Ouladsine","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"J.","family":"Pinaton","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","first-page":"5289","article-title":"Virtual metrology technique for semiconductor manufacturing","author":"chang","year":"2006","journal-title":"International Joint Conference on Neural Networks 2006 IJCNN '06"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2007.907609"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/j.ces.2004.04.020"},{"key":"ref13","doi-asserted-by":"crossref","first-page":"27","DOI":"10.1016\/j.theochem.2006.09.026","article-title":"Qspr study for estimation of acidity constants of some aromatic acids derivatives using multiple linear regression MLR analysis","volume":"805","author":"cheng","year":"2007","journal-title":"Journal of Molecular Structure THEOCHEM"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2013.2273435"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2008.2001219"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1080\/00207720802645204"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1002\/wics.51"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2007.897275"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.5923\/j.control.20120203.02"},{"key":"ref4","author":"gill","year":"2011","journal-title":"Development of virtual metrology in semiconductor manufacturing"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1117\/12.896902"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.1999.798202"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.jprocont.2008.04.014"},{"key":"ref8","author":"lynn","year":"2011","journal-title":"Virtual Metrology for Plasma Etch Processes"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/j.eswa.2009.05.053"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1201\/9781420040661"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/j.jprocont.2012.01.012"},{"key":"ref9","first-page":"306","article-title":"Methods for plant data-based process modeling in soft-sensor development","volume":"52","author":"sliskovic di grbic","year":"2012","journal-title":"AUTOMATIKA casopis za automatiku mjerenje elektroniku racunarstvo i komu-nikacije"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1016\/j.eswa.2010.08.040"}],"event":{"name":"2016 5th International Conference on Systems and Control (ICSC)","location":"Marrakesh, Morocco","start":{"date-parts":[[2016,5,25]]},"end":{"date-parts":[[2016,5,27]]}},"container-title":["2016 5th International Conference on Systems and Control (ICSC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7502235\/7507016\/07507082.pdf?arnumber=7507082","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,24]],"date-time":"2017-06-24T16:33:04Z","timestamp":1498321984000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7507082\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,5]]},"references-count":20,"URL":"https:\/\/doi.org\/10.1109\/icosc.2016.7507082","relation":{},"subject":[],"published":{"date-parts":[[2016,5]]}}}