{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T15:32:05Z","timestamp":1729611125541,"version":"3.28.0"},"reference-count":20,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2016,5]]},"DOI":"10.1109\/icosc.2016.7507083","type":"proceedings-article","created":{"date-parts":[[2016,8,12]],"date-time":"2016-08-12T00:30:55Z","timestamp":1470961855000},"page":"180-185","source":"Crossref","is-referenced-by-count":1,"title":["Run To Run control based on categorical output in semiconductor manufacturing"],"prefix":"10.1109","author":[{"given":"EL Mostafa","family":"El Adel","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guillaume","family":"Graton","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mustapha","family":"Ouladsine","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jacques","family":"Pinaton","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/66.909650"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1016\/S0967-0661(03)00154-0"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/S0005-1098(00)00084-4"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1002\/1099-1638(200011\/12)16:6<515::AID-QRE359>3.0.CO;2-I"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1088\/0022-3727\/34\/18\/309"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1116\/1.1477418"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/14\/7\/003"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1080\/00207540802029633"},{"key":"ref18","doi-asserted-by":"crossref","first-page":"193","DOI":"10.1109\/66.286855","article-title":"Supervisory run-to-run control of polysilicon gate etch using in situ ellipsometry","volume":"7","author":"bulter","year":"1994","journal-title":"IEEE Trans Semiconductor Manufact"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/66.670176"},{"key":"ref4","doi-asserted-by":"crossref","first-page":"4103","DOI":"10.1080\/00207543.2010.492806","article-title":"Online parameter estimation and run-to-run process adjustment using categorical observations","volume":"49","author":"jing","year":"2011","journal-title":"International Journal of Production Research"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1198\/004017004000000239"},{"journal-title":"Run-to-Run control in semiconductor manufacturing","year":"2001","author":"moyne","key":"ref6"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.jprocont.2010.09.005"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/66.286855"},{"key":"ref7","doi-asserted-by":"crossref","first-page":"184","DOI":"10.1080\/00224065.1997.11979749","article-title":"Run-to-run process control: literature review and extensions","volume":"29","author":"castillo","year":"1997","journal-title":"Journal of Quality Technology"},{"journal-title":"Experiments Planning Analysis and Parameter Design Optimization","year":"2000","author":"wu","key":"ref2"},{"key":"ref1","doi-asserted-by":"crossref","first-page":"312","DOI":"10.1080\/00224065.2007.11917698","article-title":"Run-to-Run Process Adjustment Using Categorical Observations","volume":"39","author":"kaibo","year":"2007","journal-title":"Journal of Quality Technology"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2005.846819"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/66.909650"}],"event":{"name":"2016 5th International Conference on Systems and Control (ICSC)","start":{"date-parts":[[2016,5,25]]},"location":"Marrakesh, Morocco","end":{"date-parts":[[2016,5,27]]}},"container-title":["2016 5th International Conference on Systems and Control (ICSC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7502235\/7507016\/07507083.pdf?arnumber=7507083","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2019,9,12]],"date-time":"2019-09-12T12:54:36Z","timestamp":1568292876000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7507083\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,5]]},"references-count":20,"URL":"https:\/\/doi.org\/10.1109\/icosc.2016.7507083","relation":{},"subject":[],"published":{"date-parts":[[2016,5]]}}}