{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,15]],"date-time":"2026-01-15T05:21:08Z","timestamp":1768454468023,"version":"3.49.0"},"reference-count":18,"publisher":"IEEE","license":[{"start":{"date-parts":[[2021,6,7]],"date-time":"2021-06-07T00:00:00Z","timestamp":1623024000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,6,7]],"date-time":"2021-06-07T00:00:00Z","timestamp":1623024000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2021,6,7]]},"DOI":"10.1109\/icphm51084.2021.9486471","type":"proceedings-article","created":{"date-parts":[[2021,7,20]],"date-time":"2021-07-20T20:36:08Z","timestamp":1626813368000},"page":"1-8","source":"Crossref","is-referenced-by-count":2,"title":["Prognostics and Health Management of Wafer Chemical-Mechanical Polishing System using Autoencoder"],"prefix":"10.1109","author":[{"given":"Kart-Leong","family":"Lim","sequence":"first","affiliation":[{"name":"A*Star,Institute of Microelectronics,Singapore"}]},{"given":"Rahul","family":"Dutta","sequence":"additional","affiliation":[{"name":"A*Star,Institute of Microelectronics,Singapore"}]}],"member":"263","reference":[{"key":"ref10","author":"bishop","year":"2006","journal-title":"Pattern Recognition and Machine Learning"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/ICCA.2016.7505390"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/j.wear.2019.02.012"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/EPTC50525.2020.9315140"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1115\/1.4042051"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1016\/j.jprocont.2017.12.004"},{"key":"ref16","article-title":"Enhanced virtual metrology on chemical mechanical planarization process using an integrated model and data-driven approach","volume":"8","author":"di","year":"2017","journal-title":"Int J Progn Heal Manag"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.2991\/iceea-18.2018.26"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1016\/j.cirp.2017.04.013"},{"key":"ref4","doi-asserted-by":"crossref","first-page":"504","DOI":"10.1126\/science.1127647","article-title":"Reducing the dimensionality of data with neural networks","volume":"313","author":"hinton","year":"2006","journal-title":"Science"},{"key":"ref3","first-page":"2672","article-title":"Generative adversarial nets","author":"goodfellow","year":"2014","journal-title":"Advances in neural information processing systems"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/LSP.2020.2965328"},{"key":"ref5","first-page":"117","article-title":"Auto-encoder based data clustering","author":"song","year":"2013","journal-title":"Iberoamerican Congress on Pattern Recognition"},{"key":"ref8","doi-asserted-by":"crossref","first-page":"2126","DOI":"10.1109\/CVPR.2006.301","article-title":"Svm-knn: Discriminative nearest neighbor classification for visual category recognition","volume":"2","author":"zhang","year":"2006","journal-title":"Computer Vision and Pattern Recognition 2006 IEEE Computer Society Conference on"},{"key":"ref7","first-page":"1","article-title":"Visual categorization with bags of keypoints","volume":"1","author":"csurka","year":"2004","journal-title":"Workshop on Statistical Learning in Computer Vision ECCV"},{"key":"ref2","article-title":"Stochastic gradient vb and the variational auto-encoder","author":"kingma","year":"2014","journal-title":"Second International Conference on Learning Representations ICLR"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/CVPR.2016.90"},{"key":"ref9","first-page":"513","article-title":"Revisiting k-means: New algorithms via bayesian nonparametrics","author":"kulis","year":"2012","journal-title":"Proceedings of the 29th International Conference on Machine Learning (ICML-12)"}],"event":{"name":"2021 IEEE International Conference on Prognostics and Health Management (ICPHM)","location":"Detroit (Romulus), MI, USA","start":{"date-parts":[[2021,6,7]]},"end":{"date-parts":[[2021,6,9]]}},"container-title":["2021 IEEE International Conference on Prognostics and Health Management (ICPHM)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9486427\/9486436\/09486471.pdf?arnumber=9486471","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,9,4]],"date-time":"2024-09-04T16:54:59Z","timestamp":1725468899000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9486471\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,6,7]]},"references-count":18,"URL":"https:\/\/doi.org\/10.1109\/icphm51084.2021.9486471","relation":{},"subject":[],"published":{"date-parts":[[2021,6,7]]}}}