{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T07:56:33Z","timestamp":1729670193600,"version":"3.28.0"},"reference-count":31,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2017,5]]},"DOI":"10.1109\/icra.2017.7989068","type":"proceedings-article","created":{"date-parts":[[2017,7,25]],"date-time":"2017-07-25T21:44:28Z","timestamp":1501019068000},"page":"543-548","source":"Crossref","is-referenced-by-count":0,"title":["Close-down process scheduling of wafer residence time-constrained multi-cluster tools"],"prefix":"10.1109","author":[{"given":"QingHua","family":"Zhu","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"MengChu","family":"Zhou","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yan","family":"Qiao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"NaiQi","family":"Wu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1109\/70.964658"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1109\/ACCESS.2016.2549546"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/ICMA.2012.6284370"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2013.2281083"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2013.2296855"},{"key":"ref13","first-page":"1","article-title":"Workload balancing and scheduling of a single-armed cluster tool","author":"lee","year":"2004","journal-title":"Proceedings of the 5th APIEMS Conference"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2005.851236"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1080\/00207543.2013.774490"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2003.810936"},{"key":"ref17","first-page":"63","article-title":"Higher profits from intelligent semiconductor-equipment maintenance: ‘The source of maintenance problem","volume":"8","author":"montgomery","year":"2000","journal-title":"Future Fab Int"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2012.2199338"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2012.2222945"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2013.2278378"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2011.2180547"},{"key":"ref27","first-page":"113","article-title":"Scheduling Single-Arm Multi-Cluster Tools with Lower Bound Cycle Time via Petri Nets","volume":"17","author":"zhu","year":"2012","journal-title":"International Journal of Intelligent Control and Systems"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2006.879414"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/CoASE.2013.6653939"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2014.2375880"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1080\/00207543.2011.590949"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2013.2293552"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2012.2220355"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-642-13520-0_12"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2003.815203"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2010.2046891"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2010.2051731"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1002\/asjc.183"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2008.2000425"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2004.831948"},{"key":"ref23","doi-asserted-by":"crossref","first-page":"303","DOI":"10.1109\/TASE.2008.2008633","article-title":"A closed-form solution for schedulability and optimal scheduling of dual-arm cluster tools with wafer residency time constraint based on steady schedule analysis","volume":"7","author":"wu","year":"2010","journal-title":"IEEE Transactions on Automation Science and Engineering"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2005.852103"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2007.906678"}],"event":{"name":"2017 IEEE International Conference on Robotics and Automation (ICRA)","start":{"date-parts":[[2017,5,29]]},"location":"Singapore, Singapore","end":{"date-parts":[[2017,6,3]]}},"container-title":["2017 IEEE International Conference on Robotics and Automation (ICRA)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7960754\/7988677\/07989068.pdf?arnumber=7989068","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2019,10,1]],"date-time":"2019-10-01T16:08:13Z","timestamp":1569946093000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7989068\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,5]]},"references-count":31,"URL":"https:\/\/doi.org\/10.1109\/icra.2017.7989068","relation":{},"subject":[],"published":{"date-parts":[[2017,5]]}}}