{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,4]],"date-time":"2024-09-04T16:13:06Z","timestamp":1725466386092},"reference-count":9,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2016,10]]},"DOI":"10.1109\/icsens.2016.7808780","type":"proceedings-article","created":{"date-parts":[[2017,1,11]],"date-time":"2017-01-11T23:14:24Z","timestamp":1484176464000},"page":"1-3","source":"Crossref","is-referenced-by-count":1,"title":["Probing anchor losses in AlN-on-Si contour mode MEMS resonators through laser Doppler vibrometry"],"prefix":"10.1109","author":[{"given":"Cheng","family":"Tu","sequence":"first","affiliation":[]},{"given":"Joshua E.-Y.","family":"Lee","sequence":"additional","affiliation":[]},{"given":"Astrid","family":"Frank","sequence":"additional","affiliation":[]},{"given":"Christoph","family":"Schaffel","sequence":"additional","affiliation":[]},{"given":"Uwe","family":"Stehr","sequence":"additional","affiliation":[]},{"given":"Matthias","family":"Hein","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","first-page":"970","article-title":"High-Q low impedance UHF-band A1N-on-Si MEMS resonators using quasisymmetrical lamb wave modes","author":"zhu","year":"2016","journal-title":"Proc IEEE MEMS"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2010.5442303"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/21\/8\/085021"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2014.2367418"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/TRANSDUCERS.2011.5969687"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/26\/6\/065012"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1063\/1.4913885"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/25\/11\/115020"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/FREQ.2010.5556336"}],"event":{"name":"2016 IEEE SENSORS","start":{"date-parts":[[2016,10,30]]},"location":"Orlando, FL, USA","end":{"date-parts":[[2016,11,3]]}},"container-title":["2016 IEEE SENSORS"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7777313\/7808393\/07808780.pdf?arnumber=7808780","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,1,24]],"date-time":"2017-01-24T01:55:22Z","timestamp":1485222922000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7808780\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,10]]},"references-count":9,"URL":"https:\/\/doi.org\/10.1109\/icsens.2016.7808780","relation":{},"subject":[],"published":{"date-parts":[[2016,10]]}}}