{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T03:03:52Z","timestamp":1730257432180,"version":"3.28.0"},"reference-count":8,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2017,10]]},"DOI":"10.1109\/icsens.2017.8233927","type":"proceedings-article","created":{"date-parts":[[2018,1,2]],"date-time":"2018-01-02T17:47:51Z","timestamp":1514915271000},"page":"1-3","source":"Crossref","is-referenced-by-count":1,"title":["The effects of poly-SiGe on sensing properties for ultra-low-power CMOS-embedded MEMS sensors"],"prefix":"10.1109","author":[{"given":"Yoshihiko","family":"Kurui","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hideyuki","family":"Tomizawa","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Akira","family":"Fujimoto","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tomohiro","family":"Saito","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Akihiro","family":"Kojima","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tamio","family":"Ikehashi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yoshiaki","family":"Sugizaki","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hideki","family":"Shibata","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2002.805051"},{"key":"ref3","first-page":"39","article-title":"A 10 µmthick poly-sige gyroscope processed above 0.35µmCMOS","author":"scheurle","year":"2007","journal-title":"20th IEEE Int Conf on Micro Electro Mechanical Systems (MEMS'07)"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/ICSENS.2016.7808583"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/TRANSDUCERS.2015.7180848"},{"journal-title":"Practical MEMS Design of microsystems accelerometers gyroscopes RF MEMS optical MEMS and micro","year":"2009","author":"kaajakari","key":"ref8"},{"key":"ref7","article-title":"Evaluation of SiGe Thin Films as MEMS Material and Application of Accelerometer","author":"hirota","year":"2016","journal-title":"The 33rd SENSOR SYMPOSIUM"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2004.832189"},{"key":"ref1","first-page":"1","article-title":"Poly-SiGe for MEMS-above-CMOS Sensors","volume":"44","author":"gonz\u00e1lez ruiz","year":"2012","journal-title":"Springer Series in Advanced Microelectronics"}],"event":{"name":"2017 IEEE SENSORS","start":{"date-parts":[[2017,10,29]]},"location":"Glasgow","end":{"date-parts":[[2017,11,1]]}},"container-title":["2017 IEEE SENSORS"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8169642\/8233862\/08233927.pdf?arnumber=8233927","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,1,25]],"date-time":"2022-01-25T17:11:06Z","timestamp":1643130666000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/8233927\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,10]]},"references-count":8,"URL":"https:\/\/doi.org\/10.1109\/icsens.2017.8233927","relation":{},"subject":[],"published":{"date-parts":[[2017,10]]}}}