{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,14]],"date-time":"2026-02-14T11:28:20Z","timestamp":1771068500681,"version":"3.50.1"},"reference-count":15,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2015,12]]},"DOI":"10.1109\/icsenst.2015.7438464","type":"proceedings-article","created":{"date-parts":[[2016,3,30]],"date-time":"2016-03-30T00:53:09Z","timestamp":1459299189000},"page":"575-580","source":"Crossref","is-referenced-by-count":3,"title":["Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement"],"prefix":"10.1109","author":[{"given":"Roumen","family":"Nojdelov","sequence":"first","affiliation":[]},{"given":"Dirk","family":"Voigt","sequence":"additional","affiliation":[]},{"given":"Arthur S.","family":"van de Nes","sequence":"additional","affiliation":[]},{"given":"Stoyan","family":"Nihtianov","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.6028\/bulletin.070"},{"key":"ref11","article-title":"Capacitive Sensor Surface Quality Considerations when Measuring Sub-nanometer Displacement","author":"nihtianov","year":"2008","journal-title":"Electronics 2008 Conference"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1063\/1.1745374"},{"key":"ref13","article-title":"The conctants in the equation for atmospheric refractive index at radio frequencies","volume":"50","author":"smith","year":"1953","journal-title":"J of Res of the NBS"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1049\/ji-3-2.1945.0048"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1115\/1.3687121"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2009.2012957"},{"key":"ref3","article-title":"Capacitance-to-Digital Converter for Accurate Displacement Measurement in the Sub-nanometre Range","author":"nojdelov","year":"2014","journal-title":"Proc IMEKO TC4 Conference"},{"key":"ref6","article-title":"The Nano Positioning Book: Moving and Measuring to Better than a Nanometre","author":"hicks","year":"1997","journal-title":"Queensgate Instruments"},{"key":"ref5","article-title":"Practical Fabry-Perot displacement interferometry in ambient air conditions with subnanometer accuracy","author":"voigt","year":"2014","journal-title":"Proc SPIE 9203 Interferometry XVII Techniques and Analysis 920308"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1063\/1.322234"},{"key":"ref7","first-page":"147","article-title":"Tilt errors in parallel plate capacitance micrometry","author":"harb","year":"1995","journal-title":"International Progress in Precision Engineering Proceedings IPES 8"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/I2MTC.2014.6860971"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-642-31368-4_2"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.6028\/jres.041.040"}],"event":{"name":"2015 9th International Conference on Sensing Technology (ICST)","location":"Auckland, New Zealand","start":{"date-parts":[[2015,12,8]]},"end":{"date-parts":[[2015,12,10]]}},"container-title":["2015 9th International Conference on Sensing Technology (ICST)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7428381\/7438351\/07438464.pdf?arnumber=7438464","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,21]],"date-time":"2017-03-21T11:58:23Z","timestamp":1490097503000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7438464\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,12]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/icsenst.2015.7438464","relation":{},"subject":[],"published":{"date-parts":[[2015,12]]}}}