{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T03:19:02Z","timestamp":1729653542271,"version":"3.28.0"},"reference-count":12,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2014,10]]},"DOI":"10.1109\/icumt.2014.7002165","type":"proceedings-article","created":{"date-parts":[[2015,1,13]],"date-time":"2015-01-13T15:07:34Z","timestamp":1421161654000},"page":"578-583","source":"Crossref","is-referenced-by-count":1,"title":["Robust control of rapid thermal processes applied to vapor deposition processing"],"prefix":"10.1109","author":[{"given":"Stanislav","family":"Aranovskiy","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Aleksandr","family":"Kapitonov","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Alexey","family":"Bobtsov","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Anton","family":"Pyrkin","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Evgeny","family":"Zavarin","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Denis","family":"Davydov","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Romeo","family":"Ortega","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.5555\/S0005-1098(01)00002-4"},{"key":"ref3","doi-asserted-by":"crossref","first-page":"3910","DOI":"10.23919\/ACC.2004.1383921","article-title":"Model-based control of rapid thermal processing for semiconductor wafers","volume":"5","author":"ebert","year":"2004","journal-title":"American Control Conference 2004 Proceedings of the 2004"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1016\/j.sysconle.2007.03.011"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/TAC.2003.809820"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1149\/1.2059302"},{"key":"ref5","volume":"3","author":"khalil","year":"2002","journal-title":"Nonlinear Systems"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1007\/s10513-005-0010-8"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/CCA.2011.6044373"},{"key":"ref7","doi-asserted-by":"crossref","DOI":"10.1007\/978-1-84628-615-5","volume":"1","author":"isidori","year":"1995","journal-title":"Nonlinear Control Systems"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1117\/12.56658"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/MED.2013.6608856"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1134\/S1063782614070148"}],"event":{"name":"2014 6th International Congress on Ultra Modern Telecommunications and Control Systems and Workshops (ICUMT)","start":{"date-parts":[[2014,10,6]]},"location":"St. Petersburg, Russia","end":{"date-parts":[[2014,10,8]]}},"container-title":["2014 6th International Congress on Ultra Modern Telecommunications and Control Systems and Workshops (ICUMT)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6992915\/7002065\/07002165.pdf?arnumber=7002165","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2019,8,19]],"date-time":"2019-08-19T13:05:15Z","timestamp":1566219915000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7002165\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,10]]},"references-count":12,"URL":"https:\/\/doi.org\/10.1109\/icumt.2014.7002165","relation":{},"subject":[],"published":{"date-parts":[[2014,10]]}}}