{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T06:11:36Z","timestamp":1729663896683,"version":"3.28.0"},"reference-count":18,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2014,10]]},"DOI":"10.1109\/iecon.2014.7048832","type":"proceedings-article","created":{"date-parts":[[2015,5,22]],"date-time":"2015-05-22T21:04:43Z","timestamp":1432328683000},"page":"2357-2360","source":"Crossref","is-referenced-by-count":0,"title":["Integrated MEMS actuators for sub-Micron patterning on thin polymer films"],"prefix":"10.1109","author":[{"given":"Emad","family":"Mehdizadeh","sequence":"first","affiliation":[]},{"given":"Siavash","family":"Pourkamali","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1126\/science.273.5273.347"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1002\/1521-4095(200109)13:18<1386::AID-ADMA1386>3.0.CO;2-X"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1038\/376581a0"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1016\/S0169-4332(00)00352-4"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1116\/1.583937"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1021\/la00027a002"},{"key":"ref16","doi-asserted-by":"crossref","first-page":"1658","DOI":"10.1126\/science.1162193","article-title":"Polymer Pen Lithography","volume":"321","author":"huo","year":"2008","journal-title":"Science"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1038\/nature09697"},{"key":"ref18","first-page":"93","article-title":"Two Degrees-Of-Freedom Thermally Actuated Nano-Positioner with Integrated Nano-Tips For Scanning Probe Nanolithography","author":"mehdizadeh","year":"0","journal-title":"Proc 2013 Nanomechanical Sensing Workshop"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1002\/adma.200501612"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1126\/science.8493529"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1098\/rspa.2004.1313"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1002\/anie.199200451"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1149\/1.1798151"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1149\/1.1436085"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1038\/356047a0"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1021\/ja00075a030"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1039\/b416951d"}],"event":{"name":"IECON 2014 - 40th Annual Conference of the IEEE Industrial Electronics Society","start":{"date-parts":[[2014,10,29]]},"location":"Dallas, TX, USA","end":{"date-parts":[[2014,11,1]]}},"container-title":["IECON 2014 - 40th Annual Conference of the IEEE Industrial Electronics Society"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7036020\/7048466\/07048832.pdf?arnumber=7048832","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,23]],"date-time":"2017-06-23T08:12:39Z","timestamp":1498205559000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7048832\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,10]]},"references-count":18,"URL":"https:\/\/doi.org\/10.1109\/iecon.2014.7048832","relation":{},"subject":[],"published":{"date-parts":[[2014,10]]}}}