{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T05:15:22Z","timestamp":1730265322122,"version":"3.28.0"},"reference-count":15,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2018,8]]},"DOI":"10.1109\/iisr.2018.8535672","type":"proceedings-article","created":{"date-parts":[[2018,11,16]],"date-time":"2018-11-16T02:18:10Z","timestamp":1542334690000},"page":"110-115","source":"Crossref","is-referenced-by-count":1,"title":["Design and PID Control of Piezoelectric Micro-motion Stage"],"prefix":"10.1109","author":[{"given":"Feng","family":"Sun","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shengfei","family":"Qi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Junshan","family":"Bao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fangchao","family":"Xu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wenhui","family":"Zhao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/TCST.2012.2206029"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2010.2081979"},{"key":"ref12","first-page":"35","article-title":"Dynamic hys-teresis modeling and H-infinity robust control of piezoelectric actu-ators [J]","volume":"31","author":"zhenyan","year":"2014","journal-title":"Control theory and applications"},{"key":"ref13","first-page":"96","article-title":"Control design for piezoelectric actuator systems [J]","volume":"20","author":"yi","year":"2016","journal-title":"Electric Machines and Control"},{"key":"ref14","first-page":"572","article-title":"Precise Position Control of aLinear Stage Integrated With an Inchworm Type Actuator [C]","author":"chanwoo","year":"2004","journal-title":"SICE Annual Conference in Sapporo"},{"key":"ref15","first-page":"53708-1","article-title":"Active damping of thescanner for high-speed atomic force microscopy[J]","volume":"76","author":"kodera","year":"2005","journal-title":"Review of Sci-entific Instruments"},{"key":"ref4","first-page":"102","article-title":"Linear Modeling for input-output relations of a rhombic micro-displacement piezoelectric actuator [J]","volume":"48","author":"zhang","year":"2014","journal-title":"Journal of Xi' an Jiaotong University"},{"key":"ref3","first-page":"935","article-title":"Parametric design of flexible amplification mechanism based on flexure hinge [J]","volume":"36","author":"lu","year":"2016","journal-title":"Journal of Vibration Measurement & Diagnosis"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/TRO.2009.2014130"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1007\/s12541-012-0213-1"},{"journal-title":"Research on structure of micro-displacement work table based on a novel rhombic amplification mechanism [D]","year":"2005","author":"fang","key":"ref8"},{"key":"ref7","first-page":"30","article-title":"Structure and Parameter Design for Two Degrees of Freedom Micro-positioning Mechanism with Large Travel[J]","volume":"12","author":"yanfei","year":"2010","journal-title":"Journal of Mechanical Engineering"},{"key":"ref2","doi-asserted-by":"crossref","first-page":"1067","DOI":"10.1007\/s00542-016-2854-y","article-title":"Design and control of a novel piezo-driven XY parallel nanopositioning stage [J]","volume":"23","author":"zhang","year":"2017","journal-title":"Microsystem Technology"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2015.2510450"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/TCST.2012.2200896"}],"event":{"name":"2018 IEEE International Conference on Intelligence and Safety for Robotics (ISR)","start":{"date-parts":[[2018,8,24]]},"location":"Shenyang","end":{"date-parts":[[2018,8,27]]}},"container-title":["2018 IEEE International Conference on Intelligence and Safety for Robotics (ISR)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8517202\/8535604\/08535672.pdf?arnumber=8535672","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,1,26]],"date-time":"2022-01-26T21:37:39Z","timestamp":1643233059000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8535672\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,8]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/iisr.2018.8535672","relation":{},"subject":[],"published":{"date-parts":[[2018,8]]}}}