{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,1]],"date-time":"2026-06-01T23:32:47Z","timestamp":1780356767851,"version":"3.54.1"},"reference-count":13,"publisher":"IEEE","license":[{"start":{"date-parts":[[2022,5,1]],"date-time":"2022-05-01T00:00:00Z","timestamp":1651363200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2022,5,1]],"date-time":"2022-05-01T00:00:00Z","timestamp":1651363200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100011688","name":"ECSEL","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100011688","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2022,5]]},"DOI":"10.1109\/imw52921.2022.9779252","type":"proceedings-article","created":{"date-parts":[[2022,5,25]],"date-time":"2022-05-25T19:42:43Z","timestamp":1653507763000},"page":"1-4","source":"Crossref","is-referenced-by-count":18,"title":["Integration of BEoL Compatible 1T1C FeFET Memory Into an Established CMOS Technology"],"prefix":"10.1109","author":[{"given":"David","family":"Lehninger","sequence":"first","affiliation":[{"name":"Fraunhofer Institute for Photonic Microsystems,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hannes","family":"Mahne","sequence":"additional","affiliation":[{"name":"X-FAB Dresden GmbH & Co. KG,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Tarek","family":"Ali","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Photonic Microsystems,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Raik","family":"Hoffmann","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Photonic Microsystems,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ricardo","family":"Olivo","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Photonic Microsystems,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Maximilian","family":"Lederer","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Photonic Microsystems,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Konstantin","family":"Mertens","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Photonic Microsystems,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Thomas","family":"Kampfe","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Photonic Microsystems,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kati","family":"Biedermann","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Photonic Microsystems,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Matthias","family":"Landwehr","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Photonic Microsystems,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Andreas","family":"Heinig","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Photonic Microsystems,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Defu","family":"Wang","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Photonic Microsystems,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yukai","family":"Shen","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Photonic Microsystems,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kerstin","family":"Bernert","sequence":"additional","affiliation":[{"name":"X-FAB Dresden GmbH & Co. KG,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Steffen","family":"Thiem","sequence":"additional","affiliation":[{"name":"X-FAB Dresden GmbH & Co. KG,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Konrad","family":"Seidel","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Photonic Microsystems,Dresden,Germany,01109"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2019.111013"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/IITC51362.2021.9537346"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1002\/pssr.202100086"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/IMW48823.2020.9108150"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1063\/1.3636434"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1063\/1.2336999"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1002\/pssr.202100028"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1063\/1.4919135"},{"key":"ref8","first-page":"1","article-title":"Furnace annealed HfO2-Pilms for the Integration of Ferroelectric Functionalities into the BEoL","author":"lehninger","year":"0","journal-title":"2020 Joint Conference of the IEEE IFCS-ISAF"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1002\/pssa.201900840"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/MM.2020.3026667"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/MDAT.2019.2899075"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1002\/aelm.202100082"}],"event":{"name":"2022 IEEE International Memory Workshop (IMW)","location":"Dresden, Germany","start":{"date-parts":[[2022,5,15]]},"end":{"date-parts":[[2022,5,18]]}},"container-title":["2022 IEEE International Memory Workshop (IMW)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9779263\/9779243\/09779252.pdf?arnumber=9779252","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,6,27]],"date-time":"2022-06-27T21:18:00Z","timestamp":1656364680000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9779252\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022,5]]},"references-count":13,"URL":"https:\/\/doi.org\/10.1109\/imw52921.2022.9779252","relation":{},"subject":[],"published":{"date-parts":[[2022,5]]}}}