{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,8]],"date-time":"2025-10-08T16:16:51Z","timestamp":1759940211611,"version":"3.41.0"},"reference-count":21,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2017,11]]},"DOI":"10.1109\/intellect.2017.8277644","type":"proceedings-article","created":{"date-parts":[[2018,2,1]],"date-time":"2018-02-01T21:46:03Z","timestamp":1517521563000},"page":"1-8","source":"Crossref","is-referenced-by-count":3,"title":["Design and analysis of CMOS MEMS based single proof mass Tri-axial capacitive accelerometer with readout integrated circuit"],"prefix":"10.1109","author":[{"given":"Muhammad Aaquib","family":"Shahbaz","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zain Hussain","family":"Warsi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shahzadi Mahaa","family":"Irshad","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shahzada Tahaa","family":"Irshad","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Syed Arsalan","family":"Jawed","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.3390\/s100403835"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2015.2451079"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2007.10.026"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/15\/11\/017"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2014.10.005"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1117\/12.190901"},{"key":"ref16","article-title":"A Three-Axis Micromachined Accelerometer with a CMOS Position-Sense Interface and Digital Offset Trim Electronics","volume":"34","author":"mark","year":"1999","journal-title":"IEEE Journal of Solid-State Circuits"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/IIC.2015.7150884"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1007\/s13369-013-0585-2"},{"key":"ref19","first-page":"283","article-title":"Surface micro machined z-axis vibratory rate gyroscope","author":"clark","year":"1996","journal-title":"Proc IEEE Solid-State Sensor and Actuator Workshop"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2016.02.022"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.3390\/s8020784"},{"key":"ref6","doi-asserted-by":"crossref","first-page":"55","DOI":"10.1007\/s00542-013-1904-y","article-title":"Design, fabrication and characterization of high performance SOI MEMS piezoresistive accelerometers","volume":"21","author":"lal roy","year":"2015","journal-title":"Journal of Micro system Technologies"},{"key":"ref5","first-page":"656","article-title":"Single-mask SOI fabrication process linear & angular piezoresistive accelerometers with on-chip reference resistors","author":"jesper eklund","year":"2005","journal-title":"IEEE Sensors"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/j.proeng.2011.12.151"},{"journal-title":"Analysis and design of a novel piezoresistive accelerometer with axially stressed self-supporting sensing beams Sensors and Actuators A","year":"0","author":"xu","key":"ref7"},{"key":"ref2","doi-asserted-by":"crossref","first-page":"5","DOI":"10.70729\/J2013358","article-title":"Vibration Monitoring of Rotating Machines Using MEMS Accelerometer","volume":"2","author":"chaudhury","year":"2014","journal-title":"International Journal of Scientific & Engineering Research"},{"key":"ref1","first-page":"6","article-title":"An Introduction to MEMS Vibration Monitoring","volume":"48","author":"looney","year":"2014","journal-title":"Analog Dialogue"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2011.2136376"},{"key":"ref20","volume":"7","author":"sutri","year":"2013","journal-title":"Chopper Stabilized Low-Power Low-Noise Front End Interface Circuit for Capacitive CMOS MEMS Sensor Applications"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/NEMS.2008.4484503"}],"event":{"name":"2017 First International Conference on Latest trends in Electrical Engineering and Computing Technologies (INTELLECT)","start":{"date-parts":[[2017,11,15]]},"location":"Karachi","end":{"date-parts":[[2017,11,16]]}},"container-title":["2017 First International Conference on Latest trends in Electrical Engineering and Computing Technologies (INTELLECT)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8267171\/8277612\/08277644.pdf?arnumber=8277644","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,6,30]],"date-time":"2025-06-30T12:26:51Z","timestamp":1751286411000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/8277644\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,11]]},"references-count":21,"URL":"https:\/\/doi.org\/10.1109\/intellect.2017.8277644","relation":{},"subject":[],"published":{"date-parts":[[2017,11]]}}}